GaN HEMT Structure for Electroluminescent Irradiation Damage Detection

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Solution Overview

Problem

Current GaN HEMT devices face challenges in irradiation damage detection due to lack of systematic and comprehensive characterization methods, leading to instability and performance degradation in aerospace applications.

Innovation Solution

A GaN HEMT device with a specific structure and analysis process using electroluminescence to detect irradiation damage by acquiring light-emitting wavelength and intensity data before and after irradiation, allowing for analysis of defect types and positions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a wide bandgap gallium nitride material is used in HEMT devices, then irradiation resistance is improved, but manufacturing complexity and structural heterogeneity cause point defects and line defects that reduce device stability

Engineering Contradiction:
Improveirradiation resistanceVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The device structure is segmented into distinct functional layers including AlGaN barrier layer, GaN layer, and p-type GaN layer, with each layer optimized independently to reduce defect propagation while maintaining irradiation resistance

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the device are given different properties: the barrier layer uses specific Al composition for carrier confinement, the p-type layer is positioned strategically for field control, and transparent electrodes are placed at specific locations for optical detection without compromising overall device performance

Inventive Principle:
Principle #3Local quality

2Reliability

If heterogeneous epitaxial growth technique is used to manufacture gallium nitride material, then device performance is improved, but point defects and line defects are introduced that affect irradiation resistant performance

Engineering Contradiction:
Improvedevice performanceVSAvoiddefect density
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The p-type GaN layer is introduced during the epitaxial growth process as a preliminary step to compensate for defects that will form during subsequent device operation and irradiation, proactively mitigating defect effects before they degrade performance

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The device employs composite material structure combining AlGaN barrier layer with GaN channel layer and p-type GaN layer, where each material component contributes specific properties that collectively enhance irradiation resistance while maintaining high performance

Inventive Principle:
Principle #40Composite materials

3Adaptability or versatility

If complex heterojunction design is implemented in HEMT devices, then device functionality is enhanced, but lateral electric field becomes uneven with spike fields that increase sensitivity to irradiation effects

Engineering Contradiction:
Improvedevice functionalityVSAvoidsensitivity to irradiation effects
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The p-type GaN layer is strategically positioned at the heterojunction interface to locally modify the electric field distribution, creating a field-plate effect that smooths out spike fields in critical regions while preserving the beneficial uneven field distribution needed for device functionality

Inventive Principle:
Principle #3Local quality

4Measurement precision

If systematic and comprehensive characterization method for irradiation damage is implemented, then defect detection capability is improved, but device complexity and measurement requirements increase

Engineering Contradiction:
Improvedefect detection capabilityVSAvoidmeasurement system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The device incorporates transparent electrodes and light-emitting structures that serve dual purposes: as electrical contacts for device operation and as optical pathways for electroluminescence-based defect detection, eliminating the need for separate characterization structures

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The device uses its own electroluminescence emission during normal operation to reveal defect locations and types, allowing self-diagnosis of irradiation damage without requiring external testing equipment or additional measurement infrastructure

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solution enables precise detection of irradiation-induced defects in GaN HEMT devices, improving understanding of radiation damage mechanisms and enhancing the reliability assessment of the devices.

Implementation Method 1

Through an electroluminescence means, before and after irradiation to the GaN HEMT device, in a vertical direction, light-emitting wavelength and intensity of characteristic light after passing through a transparent electrode are acquired

Methodology Applied
Scientific EffectElectroluminescence: Electroluminescence

Data Source

PatentUS12287360B1GaN HEMT device for irradiation damage detection and detection and manufacturing method therefor
Publication Date: 2025.04.29 NANJING UNIV
  • US12287360B1 patent drawing
  • US12287360B1 patent drawing
  • US12287360B1 patent drawing

AI summary

The present invention discloses a GaN HEMT device for irradiation damage detection which comprises a substrate layer, a gallium nitride layer, a barrier layer and a dielectric layer. A p-type gallium nitride layer is provided on the barrier layer. A drain and a source are respectively located at an inner side and an outer side of the p-type gallium nitride layer and provided on the gallium nitride layer. A Schottky metal layer is provided on the p-type gallium nitride layer. A first ohmic metal layer and a second ohmic metal layer are respectively located at an inner side and an outer side of the p-type gallium nitride layer and provided on the barrier layer. The second ohmic metal layer includes inner gear electrodes and outer gear electrodes, which are interdigital with each other.