Hybrid GaN Schottky Diode Structure for Low Turn-On and High Breakdown

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Solution Overview

Problem

High breakdown field in wide bandgap semiconductors like GaN is challenging to achieve within devices due to high on-state power loss in p-n diodes, while Schottky diodes offer low turn-on voltage but with limited maximum field, and the introduction of high permittivity dielectrics increases turn-on voltage.

Innovation Solution

A hybrid Schottky diode design where the forward characteristics are determined by the metal-semiconductor junction and reverse characteristics and breakdown by the metal/dielectric/semiconductor junction, utilizing a high-K dielectric with a dielectric constant greater than 25 disposed between the anode and cathode to achieve low turn-on voltage and high breakdown voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a p-n junction is used to achieve high breakdown voltage, then breakdown voltage is improved, but turn-on voltage increases causing higher on-state power loss

Engineering Contradiction:
Improvebreakdown voltageVSAvoidon-state power loss
Core Design Contradiction:
StrengthVSLoss of energy

Solution Approach 1:

The device is segmented into two separate junctions: a Schottky junction for low-voltage forward conduction and a p-n junction for high-voltage reverse blocking. This segmentation allows each junction to optimize its function independently, achieving low turn-on voltage through the Schottky contact while maintaining high breakdown voltage through the p-n junction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the device have different functional qualities: the metal-semiconductor contact region provides low turn-on voltage characteristics, while the p-n junction region provides high breakdown voltage characteristics. This local differentiation of quality allows simultaneous optimization of both contradictory requirements.

Inventive Principle:
Principle #3Local quality

2Use of energy by moving object

If a Schottky diode is used to achieve low turn-on voltage, then turn-on voltage is improved, but maximum field is limited by metal/semiconductor barrier height

Engineering Contradiction:
Improveturn-on voltageVSAvoidmaximum field
Core Design Contradiction:
Use of energy by moving objectVSStrength

Solution Approach 1:

The device separates the functions of low turn-on voltage and high maximum field into different junctions. The Schottky junction handles forward conduction with low turn-on voltage, while the p-n junction handles reverse blocking with high maximum field capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The p-n junction acts as an intermediary that enables the Schottky diode to achieve higher breakdown voltages than would be possible with the metal-semiconductor barrier alone. The p-n junction provides the additional field sustainment capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Strength

If high permittivity dielectrics are introduced to increase breakdown voltage, then breakdown voltage is improved, but turn-on voltage increases

Engineering Contradiction:
Improvebreakdown voltageVSAvoidturn-on voltage
Core Design Contradiction:
StrengthVSUse of energy by moving object

Solution Approach 1:

The device segments the breakdown enhancement function from the turn-on voltage determination. The p-n junction provides breakdown voltage enhancement without affecting the Schottky junction turn-on characteristics, avoiding the turn-on voltage increase associated with high permittivity dielectrics.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The hybrid Schottky diode demonstrates significant improvement in breakdown performance with average breakdown fields up to 2.22 MV/cm and reduced turn-on voltage of 0.47 V, enabling state-of-the-art power switching figures of merit for GaN lateral Schottky diodes.

Implementation Method 1

Recently, it was shown that high dielectric permittivity heterojunctions reduce the field at the metal Schottky barrier and make electric fields uniform in the depletion region, thus enabling higher average fields and breakdown voltage.

Methodology Applied
Scientific EffectDielectric permittivity: Dielectric Permittivity

Implementation Method 2

Schottky diodes provide the advantage of low turn on voltage, but the maximum field achievable is limited by the metal/semiconductor barrier height.

Methodology Applied
Scientific EffectSchottky barrier:

Implementation Method 3

high dielectric permittivity heterojunctions reduce the field at the metal Schottky barrier and make electric fields uniform in the depletion region

Methodology Applied
Scientific EffectHeterojunction:

Data Source

PatentUS11848389B2Low turn on and high breakdown voltage lateral diode
Publication Date: 2023.12.19 OHIO STATE INNOVATION FOUND
  • US11848389B2 patent drawing
  • US11848389B2 patent drawing
  • US11848389B2 patent drawing

AI summary

A hybrid Schottky diode is described herein where the forward characteristics are determined by the metal-semiconductor junction, and the reverse characteristics and breakdown are determined by the metal/dielectric/semiconductor junction. Experimental demonstration of such hybrid Schottky diodes shows significant improvement in the breakdown performance with average breakdown field up to 2.22 MV/cm with reduced turn on of 0.47 V and enable state-of-art power switching figure of merit for GaN lateral Schottky diodes.