Gas Cluster Ion Beam Feedback Control for Cluster Size Distribution

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Solution Overview

Problem

Current Gas Cluster Ion Beam (GCIB) equipment produces clusters with wide size distributions, leading to uneven energy distribution on substrates, requiring costly magnetic filters that sacrifice beam flux and lack real-time process parameter adjustment capabilities due to inability to determine cluster size distribution (CSD).

Innovation Solution

Implementing a feedback loop that measures beam current and time-of-flight (TOF) information to determine CSD, allowing for adjustment of process parameters without relying on magnetic filters, thereby enhancing throughput and reducing equipment costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If magnetic filters are used to narrow cluster size distribution, then manufacturing precision is improved, but device complexity and cost increase

Engineering Contradiction:

Improvecluster size distribution controlVSAvoidmagnetic filter system

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent implements a feedback control system that measures beam current and time-of-flight information to determine cluster size distribution in real-time, then adjusts process parameters to control the cluster size distribution at the source, eliminating the need for magnetic filters

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The patent replaces the mechanical magnetic filter system with an electronic control system that uses detectors, processors, and feedback loops to control cluster size distribution through real-time measurement and parameter adjustment

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If magnetic filters are used to narrow cluster size distribution, then manufacturing precision is improved, but productivity decreases due to beam flux sacrifice

Engineering Contradiction:

Improvecluster size distribution controlVSAvoidbeam flux

Core Design Contradiction:

Manufacturing precisionVSProductivity

Solution Approach 1:

The patent performs preliminary control of cluster size distribution by adjusting process parameters before the beam reaches the substrate, preventing the need for later filtering that would sacrifice beam flux

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The feedback system continuously monitors cluster size distribution and adjusts process parameters in real-time to maintain optimal distribution without reducing beam flux through filtering

Inventive Principle:

Principle #23Feedback

3Adaptability or versatility

If real-time process parameter adjustment is implemented, then adaptability is improved, but device complexity increases

Engineering Contradiction:

Improveprocess parameter adjustment capabilityVSAvoidfeedback control system

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The feedback control system serves multiple functions: measuring beam current, determining time-of-flight information, calculating cluster size distribution, and adjusting process parameters, consolidating these capabilities into an integrated system

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for controlled GCIB processing with reduced dependence on magnetic filters, saving space and costs, while enabling real-time adjustment of process parameters to achieve uniform energy distribution and improved substrate processing.

Implementation Method 1

ionize the passing gas cluster beam

Methodology Applied

Scientific EffectIonization: Ionisation

Implementation Method 2

measuring a beam current at the detector

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

obtaining time-of-flight information of the clusters and the monomers in the gas cluster beam

Methodology Applied

Scientific EffectTime of flight: Time of Flight

Data Source

PatentUS11715620B2Tuning gas cluster ion beam systems

Publication Date: 2023.08.01 美国泰尔制造与工程公司

AI summary

A method for processing a substrate that includes: applying, at an ionizer, a drive pulse train to an ion source to ionize a gas cluster beam and transfer the drive pulse train to the gas cluster beam; measuring, at a detector exposed to the gas cluster beam, a beam current synchronously with the drive pulse train; obtaining time-of-flight information of the clusters and the monomers in the gas cluster beam based on the beam current and the drive pulse train; determining size information relating to a size distribution of clusters and monomers in the gas cluster ion beam based on the time-of-flight information; adjusting a process parameter of the gas cluster beam based on the size information; and exposing the substrate to the gas cluster beam with the adjusted process parameter.