Gas Exchange Device for Particle Analyzer Corrosion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current particle analyzers cannot accurately detect particles smaller than 20 nm, especially in volatile organic solutions and specialty gases, leading to yield loss and product defects in semiconductor processes due to corrosion and interference.
Innovation Solution
A calibrated particle analysis apparatus with a gas exchange device that replaces volatile organic substances or specialty gases with a carrier gas, using a porous partition wall and flow controllers to ensure efficient gas exchange and particle transport to the analyzer, preventing corrosion and interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a scanning mobility particle sizer (SMPS) is used to detect particles of 20 nm or less, then particle detection capability is improved, but the device cannot directly analyze particles in volatile organic solutions or specialty gases due to corrosion
Solution Approach 1:
The system divides the gas flow into separate channels: a sample gas channel and a carrier gas channel. The sample gas containing particles is separated from the carrier gas that enters the particle analyzer, allowing particle transport without exposing the analyzer to corrosive gases. This segmentation resolves the contradiction by physically separating the harmful sample gas from the sensitive analyzer while maintaining particle detection capability.
Solution Approach 2:
A carrier gas acts as an intermediary medium to transport particles from the sample gas to the particle analyzer. The carrier gas (such as nitrogen or filtered process gas) carries particles through the gas exchange device without introducing corrosive components to the analyzer, enabling particle measurement while protecting the device from corrosion.
2Productivity
If volatile organic solutions or specialty gases are directly introduced into the particle analyzer, then particle analysis can be performed, but the volatile organic solutions and specialty gases will corrode the parts of the particle analyzer
Solution Approach 1:
The harmful volatile organic solutions or specialty gases are extracted and removed from the gas stream before it enters the particle analyzer. The gas exchange device separates the particle-carrying component from the corrosive gas component, allowing only the necessary particles to reach the analyzer while discarding or routing the corrosive gases away from the sensitive instrument.
Solution Approach 2:
A non-corrosive carrier gas serves as an intermediary between the sample source and the particle analyzer. This carrier gas transports particles without introducing corrosive elements to the analyzer, maintaining both analytical capability and device reliability over extended operation periods.
3Measurement precision
If the organic solutions and specialty gases entraining particles are analyzed directly, then particle detection is possible, but yield loss occurs due to particles falling on treated surfaces
Solution Approach 1:
The system replaces direct mechanical introduction of particles onto treated surfaces with a controlled gas-phase transport mechanism. Particles remain suspended in the carrier gas stream and are directed through the gas exchange device for analysis without contacting treated surfaces, eliminating the mechanism that causes yield loss while maintaining detection precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively eliminates analysis deviations caused by different gases, enhances safety, and extends the life of the particle analyzer by achieving high gas exchange and particle transport efficiency, allowing for accurate detection of particles as small as 20 nm.
Implementation Method 1
a porous partition wall made from a porous material having properties of resistant to corrosion, non-reactive and not easily adhered to particles
Data Source
AI summary
Calibrated particle analysis apparatus and method are provided. In the calibrated particle analysis apparatus, a gas exchange device and several flow controllers are disposed in front of a particle analyzer. Therefore, when the calibrated particle analysis apparatus is used, gases of a sample can be exchanged with a carrier gas suggested to be used with the particle analyzer. Hence, the accuracy of analyzing the particles can be increased, and possible hazards from dangerous or toxic materials can be avoided.