Adaptor for Gas Injection System Tool Actuation
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Solution Overview
Problem
Charged particle microscope instruments require complex and expensive sample manipulation tools, necessitating a solution for lower complexity and cost.
Innovation Solution
An adaptor system that integrates a tool, such as a resilient conductive non-metallic needle, with the gas injection system of the microscope, allowing sample manipulation without a separate dedicated piece of equipment, using the sample stage to move the tool relative to the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a high accuracy tool actuator is fitted inside the instrument to manipulate samples, then sample manipulation precision is improved, but device complexity and cost increase
Solution Approach 1:
The tool actuator is merged with the gas injection system by coupling the tool to the gas injection nozzle. This integration allows the gas injection system to serve dual purposes: delivering gas to the sample and providing actuation force to manipulate the tool, thereby eliminating the need for a separate dedicated actuator system
Solution Approach 2:
The gas injection system is given multi-functionality by enabling it to both inject gas and actuate the tool. The same gas injection mechanism that delivers gas to the sample is also used to provide controlled gas flow to move the tool, allowing one system to perform multiple functions
2Adaptability or versatility
If a separate dedicated piece of equipment is provided for sample manipulation, then manipulation capability is improved, but device complexity and cost increase
Solution Approach 1:
The manipulation tool is coupled to the gas injection nozzle, merging the manipulation function with the existing gas injection system. This integration eliminates the need for separate dedicated manipulation equipment while maintaining manipulation capability
Solution Approach 2:
The gas injection system is adapted to serve dual purposes: gas delivery and tool actuation. By making the system universal, it can perform both its original function and the new manipulation function without requiring separate dedicated equipment
Data Source
AI summary
An apparatus is disclosed for use in a charged particle instrument which defines an inner volume therein. The apparatus comprises an adaptor (22) having a first portion adapted for attachment to a part (20) of a gas injection system (18) of a charged particle instrument which is located within an inner volume of such an instrument; and a second portion arranged to receive a tool (24) adapted for interaction with a sample (14) located in the inner volume of such an instrument.