Gas-Jet Floating Stage Layout for Uniform Laser Substrate Processing
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Solution Overview
Problem
Laser processing apparatuses face performance deterioration due to issues during substrate conveying, leading to substrate deformation and uneven laser irradiation, which results in damage and reduced processing performance.
Innovation Solution
A laser processing apparatus with a conveying stage that includes a laser light irradiation region and a substrate conveying region, where the substrate is floated using a combination of gas jets from separate members, ensuring accurate floating height control and preventing deformation by maintaining the substrate's flatness and preventing contact with the conveying stage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate is conveyed using a floating stage with jet air, then the substrate can be conveyed without contact, but the substrate may deform and the floating height becomes uneven
Solution Approach 1:
The floating stage is divided into multiple independent gas jetting members (first member and second members) that can be controlled separately. This segmentation allows different regions to provide different gas flow characteristics, enabling both stable floating and uniform substrate flatness maintenance during conveying
Solution Approach 2:
Different regions of the floating stage have different gas jetting characteristics. The first member in the laser light irradiation region and the second members in the substrate conveying region provide localized gas flow control, ensuring optimal floating conditions for each specific area while maintaining overall substrate flatness
2Object-affected harmful factors
If the substrate is floated using gas jets, then contact with the conveying stage is prevented, but floating height control becomes difficult
Solution Approach 1:
The system incorporates sensors to detect the substrate's floating height and position in real-time. This feedback information is used to dynamically adjust the gas flow from the first and second members, maintaining precise floating height control while preventing substrate contact with the conveying stage
Solution Approach 2:
The gas flow from the jetting members is dynamically adjusted based on real-time substrate position feedback. The system can adaptively change gas flow rates and distribution patterns to maintain optimal floating height throughout the conveying process, preventing both contact and excessive floating
3Productivity
If the substrate is conveyed over a floating stage, then conveying is enabled, but laser processing performance deteriorates due to substrate deformation
Solution Approach 1:
The floating stage is segmented into distinct functional regions (laser light irradiation region and substrate conveying region) with independently controlled gas jetting members. This allows the substrate to be conveyed while maintaining uniform flatness in the laser processing area, ensuring high-quality laser processing without sacrificing conveying capability
Solution Approach 2:
The gas jetting characteristics are optimized locally for different regions. The first member in the laser irradiation region and second members in the conveying region provide tailored gas flow patterns that maintain substrate flatness where needed while enabling smooth conveying, thereby preserving laser processing quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the performance of laser processing by preventing substrate deformation and ensuring uniform laser irradiation, thereby improving the quality and reliability of the processing results.
Implementation Method 1
a surface of the laser light irradiation region facing the substrate is configured by a first member from which a first gas is capable of jetting out to float the substrate
Implementation Method 2
a laser light irradiation unit and a conveying stage capable of allowing a substrate to float and convey
Data Source
AI summary
A laser processing apparatus according to an embodiment includes a laser light irradiation unit and a conveying stage capable of allowing a substrate to float and convey. The conveying stage includes: a laser light irradiation region; and a substrate conveying region separated from the laser light irradiation region, a surface of the laser light irradiation region facing the substrate is configured by a first member from which a first gas is capable of jetting out to float the substrate, a surface of the substrate conveying region facing the substrate is configured by a plurality of second members from which a second gas is capable of jetting out to float the substrate, and the plurality of second members in the substrate conveying region are disposed to be separated from each other.