Gas Laser Chamber Cooling Layout for Low Pressure Loss

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Solution Overview

Problem

Existing gas laser devices face challenges in increasing cooling capacity without enlarging the heat exchanger, which leads to increased pressure loss and reduced flow rate of laser gas, making high repetitive operations difficult.

Innovation Solution

The implementation of multiple heat pipes and heat exchangers within the laser chamber to uniformly distribute temperature and enhance cooling capacity without increasing pressure loss, using a configuration that avoids regions of high laser gas flow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the heat exchanger is enlarged to increase cooling capacity, then the cooling efficiency is improved, but the pressure loss increases and the flow rate of laser gas decreases

Engineering Contradiction:
Improvecooling capacityVSAvoidpressure loss
Core Design Contradiction:
TemperatureVSLoss of energy

Solution Approach 1:

The heat exchanger is divided into multiple heat exchange sections arranged in the laser gas flow path. Each section provides localized heat exchange, collectively achieving high cooling capacity without requiring a single large heat exchanger that would cause excessive pressure loss. The segmented structure allows laser gas to flow through multiple smaller exchange zones rather than one large restrictive zone.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Heat pipes are introduced as a vertical heat transfer dimension, conducting heat away from the discharge space in the direction perpendicular to the laser gas flow. This three-dimensional heat removal approach (combining in-flow heat exchange and vertical heat conduction) increases cooling capacity without adding resistance to the horizontal gas flow path.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Temperature

If the heat exchanger is enlarged to increase cooling capacity, then the cooling efficiency is improved, but the flow rate of laser gas decreases

Engineering Contradiction:
Improvecooling capacityVSAvoidflow rate of laser gas
Core Design Contradiction:
TemperatureVSSpeed

Solution Approach 1:

Multiple distributed heat exchange sections create less flow resistance than a single large heat exchanger. The segmented configuration maintains better flow velocity by avoiding large pressure drops across any single exchange zone, thus preserving the flow rate necessary for high repetitive operations.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Heat pipes provide an additional vertical dimension for heat removal that does not impede the horizontal flow of laser gas. Heat is extracted through the container wall in the direction perpendicular to gas flow, allowing high flow rates to be maintained while achieving superior cooling capacity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Temperature

If multiple heat pipes and heat exchangers are arranged in the laser chamber, then the cooling capacity is enhanced and thermal distortion is suppressed, but the device complexity increases

Engineering Contradiction:
Improvethermal uniformityVSAvoidstructure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The heat pipes and heat exchangers are integrated into a unified cooling system where heat pipes conduct heat vertically to heat exchanger sections that then dissipate heat to the external environment. This merged structure achieves comprehensive thermal control through coordinated operation of multiple components rather than requiring separate independent systems.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The heat exchanger sections serve dual functions: they act as heat sinks for the heat pipes conducting heat from the discharge space, and simultaneously provide direct heat exchange with the laser gas flowing through the chamber. This multi-functionality reduces the need for additional dedicated cooling components, managing complexity while enhancing cooling capacity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration maintains cooling efficiency and suppresses thermal distortion, allowing for higher repetition frequencies of pulse laser output while minimizing pressure loss.

Implementation Method 1

a plurality of heat pipes arranged on the inner wall of the container

Methodology Applied
Scientific EffectHeat pipe: Heat Pipe

Implementation Method 2

a plurality of heat exchangers arranged as being spaced apart from each other in the container

Methodology Applied
Scientific EffectHeat exchanger: Heat Exchanger

Implementation Method 3

a fan configured to cause the laser gas to flow through a discharge space between the first electrode and the second electrode

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS20260011970A1Laser chamber, gas laser device, and electronic device manufacturing method
Publication Date: 2026.01.08 GIGAPHOTON INC
  • US20260011970A1 patent drawing
  • US20260011970A1 patent drawing
  • US20260011970A1 patent drawing

AI summary

A laser chamber of a gas laser device configured to output laser light includes a container filled with a laser gas, a first electrode extending in a first direction and arranged in the container, a second electrode arranged at a position closer to an inner wall of the container than the first electrode while extending in the first direction and facing the first electrode in a second direction perpendicular to the first direction, a fan configured to cause the laser gas to flow through a discharge space between the first electrode and the second electrode, a plurality of heat pipes arranged on the inner wall of the container, and a plurality of heat exchangers arranged as being spaced apart from each other in the container.