Gas Sensor Package with Segmented Molding and Isolated Heater

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Solution Overview

Problem

Existing gas sensor packages face challenges in minimizing dead volume and outgassing effects, which can impact measurement accuracy, especially when integrated into portable electronic devices, and require a design that ensures stable power supply and thermal insulation for sensitive layers.

Innovation Solution

A gas sensor package with a semiconductor chip featuring a sensitive layer, a heater, and a molding compound that encapsulates the chip while maintaining access to the sensitive layer, reducing dead volume and outgassing impact, and includes a die pad for thermal management and separate power supply for the heater to ensure reliable operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the gas sensor chip is fully encapsulated in molding compound, then protection and structural integrity are improved, but dead volume increases and outgassing effects worsen

Engineering Contradiction:
ImproveprotectionVSAvoiddead volume
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The patent extracts the sensitive layer from the bulk molding compound by creating a cavity that exposes it to the external environment. This allows the sensitive layer to be isolated from the harmful outgassing effects of the molding compound while maintaining the protective encapsulation for the rest of the sensor chip.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The molding compound is segmented into two distinct regions: an encapsulating region that protects the sensor chip components, and an exposed region that provides direct access to the sensitive layer. This segmentation enables differential treatment of different sensor components, protecting those that need protection while exposing those that need environmental access.

Inventive Principle:
Principle #1Segmentation

2Device complexity

If the heater and sensor share the same power supply, then device complexity is reduced, but power supply stability and thermal insulation deteriorate

Engineering Contradiction:
Improvepower supply structureVSAvoidpower supply stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The power supply system is segmented into two independent channels: one dedicated to the heater and another to the sensor. This segmentation ensures that the high current demands of the heater do not interfere with the stable voltage supply required by the sensitive sensor measurements, thereby improving overall system reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces separate power supply traces and connection points as intermediaries between the external power source and the internal heater/sensor components. These intermediary structures provide electrical isolation and independent control, preventing cross-interference between the heater and sensor power requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If the sensitive layer is fully exposed for gas access, then measurement precision is improved, but thermal insulation deteriorates

Engineering Contradiction:
Improvegas accessVSAvoidthermal insulation
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The molding compound is applied with local quality differentiation: it fully encapsulates the sensor chip substrate and heater regions for thermal protection, while deliberately leaving the sensitive layer region exposed for gas access. This localized approach provides thermal insulation exactly where needed without compromising measurement precision.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves a compact, reliable gas sensor package with reduced outgassing effects, stable power supply, and effective thermal insulation, enabling accurate gas analysis in portable devices.

Implementation Method 1

a heater (34) arranged in or under the membrane (33) for heating the sensitive layer (31)

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

A gas sensor package with a semiconductor chip featuring a sensitive layer, a heater, and a molding compound that encapsulates the chip while maintaining access to the sensitive layer, reducing dead volume and outgassing impact

Methodology Applied
Scientific EffectPhysical containment: Physical Containment

Implementation Method 3

includes a die pad for thermal management

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentEP2765410B1Gas sensor package
Publication Date: 2023.02.22 SENSIRION AG
  • EP2765410B1 patent drawingFigure 1~2
  • EP2765410B1 patent drawingFigure 3~4

AI summary

A gas sensor package comprises a gas sensor chip (3) with a layer (31) sensitive to a gas, and with a heater (34) for heating the sensitive layer (31). Contact pads (22-27) are provided for electrically contacting the gas sensor package and a die pad (21) is provided for mounting the gas sensor chip (3) to. Electrical connections connect the gas sensor chip (3) and the contact pads (22-27). A molding compound (1) at least partially encloses the gas sensor chip (3). An opening (11) in the molding compound (1) provides access to the sensitive layer (31) of the gas sensor chip (3). One of the contact pads (26) serves as a pin for supplying electrical current to the heater (34) of the gas sensor chip (3).