Gas Storage Tank Heating by Process Chamber Contact
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Solution Overview
Problem
In single-wafer-type substrate processing, achieving high aspect ratio film coverage while minimizing energy consumption is challenging due to the need for uniform heating of gas tanks, which often results in inefficient energy use.
Innovation Solution
A substrate processing apparatus with a process container and storage tanks that are partially in contact with the outer wall, using a temperature regulator to control the internal temperature of the tanks, reducing thermal decomposition and allowing for efficient heat reuse from the process container.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If tanks are heated uniformly to improve gas supply performance, then coverage performance is improved, but energy consumption increases
Solution Approach 1:
The process container's heated wall automatically serves as the heating source for the tanks, eliminating the need for separate heating devices. The tanks self-regulate their temperature by thermal contact with the process container wall, achieving uniform heating without additional energy input.
Solution Approach 2:
The heating function is merged into the process container wall, which simultaneously serves as both the process heating element and the tank heating source. This consolidation eliminates redundant heating devices and reduces overall energy consumption while maintaining effective tank heating.
2Stability of the object's composition
If heating devices are added to warm tanks uniformly, then temperature uniformity is improved, but device complexity increases
Solution Approach 1:
The tanks utilize the process container wall's heat automatically through thermal contact, eliminating the need for separate heating devices and temperature control systems. This self-heating mechanism maintains temperature uniformity without adding device complexity.
Solution Approach 2:
The process container wall performs multiple functions: it heats the process space and simultaneously serves as the heating source for the tanks. This multi-functionality eliminates the need for dedicated tank heating devices, reducing overall system complexity.
3Productivity
If tanks are installed at gas supply pipes for batch processing, then gas supply efficiency is improved, but heat loss increases
Solution Approach 1:
The tanks are positioned to thermally contact the process container wall, merging the process heating function with the tank heating function. This eliminates redundant heating and reduces heat loss to the environment, while maintaining efficient gas supply capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances film characteristics by preventing thermal decomposition and reducing energy consumption, achieving improved coverage performance while saving energy by utilizing heat from the process container.
Implementation Method 1
a storage container which is at least partially in contact with an outer wall of the process container and is configured to store a gas to be supplied into the process container
Data Source
AI summary
A technique includes a process container configured to process a substrate, a storage container which is at least partially in contact with an outer wall of the process container and is configured to store a gas to be supplied into the process container, and a temperature regulator configured to regulate an internal temperature of the storage container.