Combined Getter Ion Pump Flange Integration
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Solution Overview
Problem
Existing ultra-high vacuum systems using separate ion and getter pumps face issues with size, weight, and energy consumption due to the large size and high energy requirements of ion pumps, as well as the need for multiple access points which can lead to vacuum degradation at apertures and connections.
Innovation Solution
A combined pumping system integrating a getter pump and an ion pump on the same flange, where the getter pump is optimized with NEG materials and a compact ion pump design, including a single anode element and a permanent magnet, to minimize size and weight while maintaining efficient gas sorption and ionization capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If ion pumps are used to achieve ultra-high vacuum conditions, then gas blocking capability is improved, but weight and size increase significantly
Solution Approach 1:
The patent combines an ion pump and a getter pump into a single integrated unit. The ion pump portion provides effective gas blocking capability while the getter pump portion contributes to weight reduction. This merging allows the system to maintain the reliability benefits of ion pumps while achieving the weight advantages of getter pumps, directly resolving the contradiction between gas blocking capability and pump weight.
2Reliability
If ion pumps are used to achieve ultra-high vacuum conditions, then gas blocking capability is improved, but device size increases
Solution Approach 1:
The integrated pump design merges the ion pump and getter pump into a single compact unit that occupies less space than separate installations. The ion pump portion maintains effective gas blocking while the combined design optimizes space utilization, directly addressing the contradiction between gas blocking capability and device size.
3Productivity
If separate ion and getter pumps are used, then pumping efficiency is improved, but number of access points increases
Solution Approach 1:
By integrating both ion pump and getter pump functions into a single device mounted on one flange, the patent reduces the number of access points from two (separate pumps) to one (integrated unit). This maintains the pumping efficiency benefits of having both pump types while simplifying the system architecture and reducing potential vacuum degradation points.
4Productivity
If multiple separate pumps are used, then vacuum pumping performance is improved, but reliability decreases due to more connection points
Solution Approach 1:
The integrated design combines multiple pump functions in a single unit with a single flange connection, eliminating multiple potential leak points while maintaining effective vacuum pumping performance. This directly resolves the contradiction by reducing the number of connections from two to one, thereby improving reliability while preserving pumping capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The combined system reduces overall size and weight, improves gas sorption efficiency, and minimizes the number of access points, enhancing the reliability and efficiency of ultra-high vacuum systems by integrating both pumps on a single flange, thus addressing the limitations of separate pump systems.
Implementation Method 1
Getter pumps operate on the principle of the chemical sorption of reactive gaseous species such as oxygen, hydrogen, water and carbon oxides by members made of non-evaporable getter materials (known in the field as NEG)
Implementation Method 2
In each of these members, ions and electrons are generated by ionization of the gaseous species present in the chamber as effect of the high electrical fields being applied
Implementation Method 3
A magnet arranged around each member provides the electrons with a non-linear (generally helical) trajectory, so to improve their ability to ionize other molecules present in the chamber
Implementation Method 4
The set of ions so generated is embedded in the member walls, partially due to ion implantation into the same walls
Implementation Method 5
partially due to a 'burial' effect underneath titanium layers formed by the deposition of atoms (or clusters of atoms) generated by the erosion of the walls upon ion bombardment
Implementation Method 6
Titanium has also an intrinsic gettering ability, i.e. it can interact with simple gaseous molecules fixing them through the formation of chemical compounds or the physical sorption
Data Source
Figure 1
Figure 2~3
Figure 4~5
AI summary
A combined pumping system (10) comprises a getter pump (12) and an ion pump (13). The getter and ion pumps (12, 13) are mounted on a same flange (11) and are arranged on the same side of said flange (11) at two different points thereof.