Non-evaporable Getter Mesh Frame Deformation Control

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Solution Overview

Problem

Non-evaporable getter pumps face issues with powder-state getter material dispersion due to mesh deformation during conveyance and use, leading to fine powder leakage and reduced pumping speed when mesh openings are made smaller to prevent dispersion.

Innovation Solution

A non-evaporable getter with a mesh attached to a frame that suppresses deformation, using a powder-state getter material with particle sizes larger than the mesh openings to prevent leakage and maintain pumping efficiency, and a non-evaporable getter pump design that encapsulates the getter material within a cylindrical stainless-steel frame and mesh structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the mesh opening size is reduced to prevent powder dispersion, then the containment of getter material is improved, but the pumping speed deteriorates due to increased resistance to gas flow

Engineering Contradiction:

Improvecontainment of getter materialVSAvoidpumping speed

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The mesh structure is segmented into multiple layers with different opening sizes. The first mesh layer has larger openings that allow efficient gas flow while the second mesh layer has smaller openings that provide enhanced containment of fine powder particles. This segmentation enables each layer to perform its specific function optimally without compromising the other.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the mesh structure have different opening characteristics. The mesh openings are designed with varying sizes at different locations to balance containment requirements and gas flow requirements. This local differentiation allows the structure to simultaneously achieve good powder containment and maintain high pumping speed.

Inventive Principle:

Principle #3Local quality

2Reliability

If the mesh opening size is reduced to prevent powder dispersion, then the containment of getter material is improved, but the mesh deformation increases under operational stress

Engineering Contradiction:

Improvecontainment of getter materialVSAvoidmesh deformation resistance

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The mesh is constructed using composite material structure with optimized alloy composition and cross-sectional geometry. The mesh material combines high strength characteristics with appropriate flexibility, allowing it to resist deformation under operational stress while maintaining the required opening sizes for powder containment.

Inventive Principle:

Principle #40Composite materials

Solution Approach 2:

The mesh structure incorporates three-dimensional geometric features such as reinforced ribs, curved profiles, or layered configurations that provide additional structural support. These dimensional additions enhance the mesh's resistance to deformation without significantly reducing the opening sizes needed for powder containment.

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If powder-state getter material is used instead of pill-state, then the manufacturing cost is reduced and electrostatic shielding is enhanced, but the powder dispersion increases during conveyance

Engineering Contradiction:

Improvemanufacturing costVSAvoidpowder dispersion

Core Design Contradiction:

Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The powder-state getter material is nested within a multi-layer mesh structure that provides progressive containment. The first mesh layer with larger openings allows gas flow while the second mesh layer with smaller openings provides enhanced containment. This nested arrangement prevents powder dispersion during conveyance while maintaining the cost advantages of using powder-state material.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The mesh structure acts as an intermediary between the powder-state getter material and the external environment. It provides a protective interface that prevents direct exposure and dispersion of the powder particles during handling and conveyance, while still allowing the powder to maintain its advantageous properties for electrostatic shielding and manufacturing.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents powder dispersion and maintains high pumping speed by suppressing mesh deformation and ensuring the powder-state getter material remains contained, while also reducing the need for costly pill-state compression and enhancing electrostatic shielding.

Implementation Method 1

a mesh (3), a frame (2) which is attached to the mesh (3) and suppresses deformation of the mesh (3), and a powder-state getter material (4) which is surrounded by the mesh (3) and the frame (2)

Methodology Applied

Scientific EffectPhysical containment: Physical Containment

Implementation Method 2

a frame (2) which is attached to the mesh (3) and suppresses deformation of the mesh (3)

Methodology Applied

Scientific EffectMechanical support:

Implementation Method 3

a getter having sorbing characteristic to various gas molecules

Methodology Applied

Scientific EffectGas sorption: Sorption

Data Source

PatentUS10107277B2Non-evaporable getter and non-evaporable getter pump

Publication Date: 2018.10.23 VACLAB

AI summary

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.