Glass Substrate Inspection Device with Light-Absorbing Platform
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Solution Overview
Problem
Existing laser scanner systems for glass substrates mistakenly interpret traces on the underside as debris on the surface, leading to incorrect defect detection and potential wastage during glass substrate production.
Innovation Solution
An inspecting device with a platform coated with a light-absorbing silicon dioxide material to absorb laser beams penetrating through the glass substrate, combined with a lens to redirect reflected beams to an image sensor, preventing interference from the underside and improving accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a laser scanner is used to scan the top surface of the glass substrate, then the inspection coverage is improved, but false detection occurs due to reflected laser beams from the underside being collected by the CCD image sensor
Solution Approach 1:
A light-absorbing material is introduced as an intermediary between the glass substrate and the platform. This material absorbs the laser beams that penetrate through the substrate, preventing them from reflecting off the platform surface and interfering with the inspection of the top surface. The intermediary effectively blocks the harmful reflected beams from reaching the CCD image sensor.
Solution Approach 2:
The harmful reflected laser beams from the underside are extracted or removed from the inspection system by using the light-absorbing material. This material selectively absorbs the unwanted reflected beams while allowing the inspection of the top surface to proceed without interference, effectively taking out the source of false detection.
2Device complexity
If the platform surface is left uncoated, then the device complexity is reduced, but background interference from reflected laser beams causes false detection
Solution Approach 1:
Instead of coating the entire platform, only the specific area where the glass substrate contacts the platform is coated with light-absorbing material. This localized coating approach minimizes the added complexity while effectively preventing false detection at the critical interference point.
Solution Approach 2:
The platform surface is modified by applying a light-absorbing coating that changes the optical properties of the surface. This coating makes the surface optically dark or absorptive, preventing the reflection of laser beams that would otherwise interfere with the inspection system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents false detection of debris on the surface by eliminating background interference from the underside, enhancing inspection accuracy and reducing unnecessary cleaning or reworking processes.
Implementation Method 1
a surface coated with a light-absorbing material so as to absorb laser beams penetrating through the glass substrate
Implementation Method 2
a lens for redirecting reflected laser beams from the surface of the glass substrate to the image sensor unit
Implementation Method 3
a mirror for directing reflected laser beams from the laser unit to the glass substrate
Data Source
AI summary
The present invention discloses an inspecting device for detecting whether there is an appearance of debris on a surface of a glass substrate, including a laser unit, a platform, and an image sensor unit. The surface of the platform is coated with a light-absorbing material so as to absorb laser beams penetrating through the glass substrate to prevent the image sensor unit from receiving the reflected laser beam from the underside of the glass substrate. Besides, the present invention discloses an inspecting apparatus for detecting whether there is an appearance of debris on a surface of a glass substrate, using the inspecting device given above, and a method for conducting inspection. The inspecting device features a simplified configuration; the method is easy to operate; and the device can effectively prevent the background interference from the underside of glass substrates when determining whether there is an appearance of debris on top surfaces of glass substrates. The device prevents mistakes in detecting glass substrates; and the device improves the accuracy rate of inspection.