Graphene-Coated Conductive Posts for Fine-Pitch Interconnects

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Semiconductor devices face challenges with high density and fine pitch electrical interconnects that lead to warpage and electrical shorting issues, particularly in dual-side molding system-in-package (DSmSiP) modules, which are exacerbated by lamination processes.

Innovation Solution

The use of graphene-coated copper core shells for conductive posts in semiconductor devices, combined with a shielding layer, to enhance electrical conductivity and reduce manufacturing costs while minimizing warpage and shorting risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If high density and fine pitch electrical interconnects are used, then signal transmission capability is improved, but warpage and electrical shorting issues occur

Engineering Contradiction:
Improvesignal transmission capabilityVSAvoidwarpage and electrical shorting
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent employs a composite conductive post structure consisting of a copper core surrounded by a graphene shell. The copper core provides high electrical conductivity for signal transmission, while the graphene shell offers exceptional mechanical strength and rigidity. This composite material approach enables the structure to maintain structural integrity and resist warpage during lamination processes, while simultaneously achieving high electrical conductivity for dense interconnect applications.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If conventional conductive posts are used in lamination processes, then manufacturing is simplified, but warpage and deviation between post areas and no-post areas occur

Engineering Contradiction:
Improvelamination process simplicityVSAvoidalignment deviation
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The graphene-copper composite structure provides superior mechanical properties including high rigidity and dimensional stability. This enables the conductive posts to maintain their position and alignment during lamination processes, reducing deviation between post areas and no-post areas while preserving ease of manufacture.

Inventive Principle:
Principle #40Composite materials

3Reliability

If copper cores are used for high electrical conductivity, then signal transmission is improved, but oxidation and reliability issues arise

Engineering Contradiction:
Improveelectrical conductivityVSAvoidoxidation
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The graphene shell serves as an intermediary protective layer between the copper core and the external environment. It completely encapsulates the copper core, preventing oxygen access and oxidation reactions. The graphene layer maintains the copper's high electrical conductivity while eliminating oxidation-related reliability issues.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The copper-graphene composite structure combines the high electrical conductivity of copper with the oxidation resistance and chemical stability of graphene. This composite approach preserves the electrical performance benefits of copper while eliminating its susceptibility to oxidation.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables high-density, low-pitch electrical interconnects with improved signal transmission and reduced manufacturing complexity, addressing warpage and shorting issues in DSmSiP modules.

Implementation Method 1

conductive posts with graphene Cu core shells

Methodology Applied
Scientific EffectGraphene: Graphene

Data Source

PatentUS12588572B2Semiconductor device and method of forming fine pitch conductive posts with graphene-coated cores
Publication Date: 2026.03.24 STATS CHIPPAC LTD
  • US12588572B2 patent drawing
  • US12588572B2 patent drawing
  • US12588572B2 patent drawing

AI summary

A semiconductor device has a substrate and an electrical component disposed over a first surface of the substrate. A first encapsulant is deposited over the first surface of the substrate. A second encapsulant is deposited over a second surface of the substrate with a via formed in the second encapsulant. A conductive material containing a graphene core shell is deposited in the via in the second encapsulant to form a conductive post. The graphene core shell can have a copper core with a graphene coating formed over the copper core. The conductive material has a matrix to embed the graphene core shell. The conductive material can have a plurality of cores covered by graphene and the graphene is interconnected within the conductive material to form an electrical path. The conductive material can have thermoset material or polymer or composite epoxy type matrix to embed the graphene core shell.