Graphene Oxide Debonding Layer for Flexible Display Substrate Separation

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Flexible display devices face challenges in manufacturing due to thickness non-uniformity in thin film deposition processes, leading to potential damage during substrate separation and alignment issues, which affect the quality and reliability of the display devices.

Innovation Solution

A system and method for forming a debonding layer using a graphene oxide coating on a support substrate, involving electrolytic treatment, multiple coating layers, and optical measurement to ensure uniform thickness, allowing for precise classification and re-coating of defective areas to prevent damage during substrate separation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If thin film deposition is performed on curved or folded substrates, then flexible display devices can be manufactured, but thickness non-uniformity occurs in the thin film deposition

Engineering Contradiction:
Improveflexibility of display deviceVSAvoidthickness uniformity of thin film
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

A debonding layer is formed on the support substrate before the thin film deposition process. This preliminary action creates a controlled interface that allows for subsequent separation, enabling the support substrate to be removed and leaving only the uniformly deposited thin film on the flexible substrate.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The substrate structure is segmented into a support substrate and a flexible substrate separated by a debonding layer. This segmentation allows the support substrate to provide mechanical stability during deposition while the flexible substrate maintains its curvature, resolving the conflict between flexibility and deposition uniformity.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If masks are used in manufacturing processes on curved substrates, then patterning can be performed, but alignment issues occur due to substrate curvature

Engineering Contradiction:
Improvepatterning capabilityVSAvoidmask alignment accuracy
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The thin film is deposited on the support substrate with the flexible substrate positioned on top before patterning. This preliminary configuration allows masks to be aligned on the flat support substrate surface, ensuring accurate alignment while still enabling flexible substrate integration.

Inventive Principle:
Principle #10Preliminary action

3Adaptability or versatility

If support substrate and flexible substrate are separated, then flexible display device is obtained, but damage may occur to the flexible substrate

Engineering Contradiction:
Improveflexibility of display deviceVSAvoidintegrity of flexible substrate
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

A debonding layer is introduced as an intermediary between the support substrate and the flexible substrate. This intermediate layer facilitates clean separation by providing a controlled debonding interface, preventing direct mechanical damage to the flexible substrate during the separation process.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The debonding layer is formed in advance on the support substrate, creating a pre-established separation interface. This preliminary preparation ensures that when separation is needed, it occurs cleanly at the debonding layer interface rather than causing damage to the flexible substrate.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution ensures a uniformly formed debonding layer that minimizes damage to flexible substrates, maintains uniform adhesive force, and increases manufacturing yield by accurately measuring and adjusting the thickness of the coating layers, thereby enhancing the separation process and overall display device quality.

Implementation Method 1

The debonding layer forming device may electrolytically treat a surface of the support substrate so that the surface of the support substrate is negatively charged

Methodology Applied
Scientific EffectElectrolytic treatment: Electrolysis

Implementation Method 2

The debonding layer forming device may form a first coating layer on the surface of the support substrate by using an electrostatic attraction force of a positively charged polymer electrolyte

Methodology Applied
Scientific EffectElectrostatic attraction: Electrostatic Induction

Implementation Method 3

The optical measuring device may include an ellipsometer for measuring a reflectance of the coating layer

Methodology Applied
Scientific EffectReflectance measurement: Reflection

Implementation Method 4

The optical measuring device may include a spectrometer for measuring a transmittance of the debonding layer

Methodology Applied
Scientific EffectTransmittance measurement: Absorption (EM radiation)

Implementation Method 5

The debonding layer forming device is configured to form a debonding layer by heat-treating the coating layer

Methodology Applied
Scientific EffectHeat treatment: Heat Treatment

Data Source

PatentUS10903241B2System of forming debonding layer, method of forming debonding layer, system of manufacturing display device using debonding layer and method of manufacturing display device debonding layer
Publication Date: 2021.01.26 SAMSUNG DISPLAY CO LTD
  • US10903241B2 patent drawing
  • US10903241B2 patent drawing
  • US10903241B2 patent drawing

AI summary

A system of forming a debonding layer includes a debonding layer forming device configured to form a coating layer by coating a graphene oxide layer on a support substrate. The debonding layer forming device is configured to form a debonding layer by heat-treating the coating layer. An optical measuring device is configured to classify the support substrate into a plurality of cell areas. The optical measuring device is configured to measure a thickness of at least one of the coating layer in at least one cell area of the plurality of cell areas.