Graphene Sensor Array With Grid Electrodes to Reduce Crosstalk

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Solution Overview

Problem

Two-dimensional materials like graphene in electronic devices and sensors are prone to damage, requiring minimal processing steps to maintain device integrity, and existing sensor technologies face challenges in reducing crosstalk and maximizing sensitivity.

Innovation Solution

A sensor array with a common conductive layer, such as graphene, and read-out circuitry that uses a grid configuration for electrodes to prevent crosstalk, along with additional sense electrodes to measure electrical parameters, allowing for sequential or simultaneous energization and reading of sensor values.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If two-dimensional materials like graphene are used in sensors, then sensitivity and performance are improved, but the materials are easily damaged leading to reduced device integrity

Engineering Contradiction:
Improvedevice integrityVSAvoidmaterial durability
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent divides the sensor structure into distinct functional layers: a robust substrate layer, electrode layers, and the graphene layer. This segmentation allows the substrate and electrodes to provide mechanical support and protection to the fragile graphene, while graphene maintains its sensing function. The graphene is isolated between protective layers that prevent direct exposure to damaging conditions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent implements protective measures before the graphene is exposed to potential damage. A substrate and electrode structure are prepared in advance to provide mechanical support and protection. The graphene is transferred onto this pre-prepared structure, ensuring it is immediately protected from environmental damage and handling stress.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

2Measurement precision

If conventional sensor architectures are used, then manufacturing is simpler, but crosstalk between adjacent sensors increases and sensitivity is reduced

Engineering Contradiction:
ImprovesensitivityVSAvoidsensor architecture complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies local quality by creating individually addressed sensor elements within the array, where each sensor has its own gate electrode and conductive layer configuration. This allows each sensor to be optimized for maximum sensitivity while maintaining electrical isolation from adjacent sensors through the common substrate structure, thereby reducing crosstalk.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent transitions from planar sensor elements to a three-dimensional structure by stacking conductive layers and electrodes in multiple dimensions. The common conductive layer extends across multiple sensors while individual gate electrodes are positioned at specific locations, creating a vertical dimension that enables both high sensitivity and electrical isolation between adjacent sensors.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If multiple processing steps are applied to graphene after incorporation, then device performance can be optimized, but the graphene is easily damaged reducing device integrity

Engineering Contradiction:
Improvedevice integrityVSAvoidperformance optimization
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent performs all necessary electrode formation, substrate preparation, and structural configuration before the graphene is transferred and incorporated into the device. This preliminary action ensures that the graphene is placed into a pre-optimized structure that requires minimal subsequent processing, thereby protecting the graphene from damage while still achieving performance optimization.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration minimizes processing steps for graphene, reduces crosstalk, and enhances sensitivity by accurately measuring electrical parameters across the sensor array, improving the overall performance and reliability of the sensors.

Implementation Method 1

The common conductive layer forms a channel between a source electrode and a drain electrode of each sensor element in the array, wherein the common conductive layer is configured to modulate a flow of charge carriers between the source electrode and the drain electrode in response to a voltage applied to a gate electrode of each sensor element in the array

Methodology Applied
Scientific EffectField effect transistor operation: Conduction (electrical)

Implementation Method 2

The read-out circuitry is configured to detect an output signal from each sensor element in the array using measurements of one or more electrical parameters

Methodology Applied
Scientific EffectElectrical measurement: Ohm's Law

Data Source

PatentEP3070741B1An apparatus comprising a sensor arrangemenet and associated fabrication method
Publication Date: 2020.07.29 EMBERION OY
  • EP3070741B1 patent drawingFigure 1~3
  • EP3070741B1 patent drawingFigure 4~5b
  • EP3070741B1 patent drawingFigure 6~7

AI summary

An apparatus comprising: a plurality of sensors (501) arranged in an array (500), each sensor having a source electrode (504), a drain electrode (503), a gate electrode (505) and a channel, wherein the source electrode and drain electrode are elongate and the channel has a channel width defined by the longitudinal extent of the source and/or drain electrode and a channel length defined by the separation between the source and drain electrodes; a common conductive or semiconductive layer (506), which may be made of graphene, comprising the channels of the sensors (501) and arranged to extend over the plurality of sensors of the array and configured to be in electrical contact with at least the source electrode and the drain electrode of each sensor; and wherein the source electrode or drain electrode of each sensor forms a substantially continuous sensor perimeter at least along the channel width which substantially encloses the other electrode of each sensor to inhibit the flow of charge carriers beyond the sensor perimeter to inhibit crosstalk between sensors in the array.