Grinding Stone Truing with Rough-Fine Dressing for SiC Precision
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Solution Overview
Problem
Conventional truing methods for grinding stones require skilled personnel, are time-consuming, and struggle with high-speed and high-precision shaping of difficult-to-machine materials like SiC, leading to rapid wear and increased costs.
Innovation Solution
A device and method utilizing a rough dressing truer and a fine dressing truer, combined with sensors and a control unit, to automate and optimize the truing process, aligning positions, and using a machining learning model for high-precision and efficient truing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional truing methods are used with skilled personnel, then truing can be performed, but it is time-consuming and requires repetition
Solution Approach 1:
The patent replaces manual mechanical truing operations with an automated laser beam system. The laser beam trues the grinding stone without requiring skilled personnel to manually operate dressing tools, thereby eliminating the time-consuming repetitive adjustments while maintaining high precision through computer-controlled laser positioning and parameters.
Solution Approach 2:
The patent utilizes controllable laser beam parameters (power, pulse duration, wavelength, focus position) to optimize the truing process. By adjusting these parameters, the system achieves high-precision truing rapidly without the need for repeated manual interventions, resolving the contradiction between precision and time.
2Manufacturing precision
If laser beam truing is used, then truing precision is improved, but the irradiation range is limited and the part that can be trued at one time is small
Solution Approach 1:
The patent divides the truing process into multiple scanning passes along the laser beam travel direction. The laser beam is moved in predetermined ranges with overlapping zones, ensuring that the entire grinding stone surface is covered through sequential segmentation of the irradiation area, thereby expanding the effective trued area while maintaining precision.
Solution Approach 2:
The patent extends the laser beam application from a single point to a two-dimensional surface by moving the laser beam in both the travel direction and the width direction. This dimensional expansion allows the entire grinding stone surface to be trued systematically, overcoming the limitation of small irradiation area.
3Manufacturing precision
If repeated truing and measurement are performed, then desired shape is achieved, but processing time increases significantly
Solution Approach 1:
The patent incorporates real-time monitoring of laser beam position, power, and truing results to dynamically adjust processing parameters. This feedback mechanism ensures that the desired shape is achieved in fewer passes by optimizing each iteration, thereby improving both precision and productivity simultaneously.
Solution Approach 2:
The patent performs preliminary planning of the laser beam path and parameters based on the target shape requirements. By pre-calculating the optimal scanning pattern and laser parameters, the system minimizes the number of repeated measurements and adjustments needed, thus reducing total processing time while ensuring shape accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-speed and high-quality truing of grinding stones with complex grooved shapes, reducing the time required and improving precision, especially for challenging materials like SiC.
Implementation Method 1
the first sensor and the second sensor are each an eddy-current sensor
Data Source
Figure 1(a)~1(b)
Figure 2
Figure 3~4
AI summary
Provided is a method for truing a grinding stone 16 for use in a device for chamfering a wafer W, the method comprising: truing the grinding stone 16 using a rough dressing truer 10-1 at high speed as rough machining to achieve a target rough dressing shape with a machining allowance left for truing; and truing, in a case where the grinding stone 16 fulfills an acceptable range of the target rough dressing shape, the grinding stone 16 using a fine dressing truer 10-2 larger in grit number than the rough dressing truer 10-1 as precision machining to achieve a target fine dressing shape. The method enables not only truing with high precision and high quality to a grinding stone having a complex grooved shape but also a reduction in the time required for truing to a difficult-to-machine material.