Multi-Beam Groove Forming with Telecentric Lens Beam Spacing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing groove forming processes using multi-beam laser processing often result in heat affected zones (HAZ), uneven bottom surfaces, and excessively inclined sidewalls due to narrow beam spacing.
Innovation Solution
A groove forming apparatus that includes a laser light source, a multi-beam generator to split the laser beam into sub-laser beams, and a focusing lens unit, with telecentric lenses to manage the beam splitting and focusing, allowing for sub-laser beams split at a maximum angle of ±3° and spaced 50 μm or more apart.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multi-beams are used with narrow spacing to increase processing efficiency, then groove forming speed is improved, but heat affected zone occurs and bottom surface becomes uneven
Solution Approach 1:
The patent applies local quality by making beam spacing non-uniform: wider spacing (50μm or more) is used in regions where heat accumulation would cause bottom over-processing, while maintaining efficient multi-beam processing elsewhere. This localized adjustment of beam spacing prevents HAZ and ensures uniform bottom surfaces while preserving overall processing efficiency.
Solution Approach 2:
The patent changes the beam spacing parameter dynamically, setting specific spacings of 50μm or more between certain beams to prevent heat affected zone formation. This parameter adjustment resolves the contradiction by optimizing the balance between processing speed (maintained through multi-beam configuration) and bottom surface quality (improved through increased spacing in critical regions).
2Productivity
If multi-beams are used with narrow spacing to increase processing efficiency, then groove forming speed is improved, but sidewalls become excessively inclined
Solution Approach 1:
The patent applies local quality by adjusting beam spacing locally to control sidewall inclination. By increasing spacing to 50μm or more in specific regions, the heat input is distributed more evenly, preventing excessive sidewall inclination while maintaining efficient multi-beam processing in other areas.
Solution Approach 2:
The patent changes the beam spacing parameter to 50μm or more in critical regions to control heat distribution and sidewall formation. This parameter modification enables the system to achieve both high processing speed through multi-beam configuration and proper sidewall geometry through localized spacing adjustment.
3Manufacturing precision
If beam spacing is increased to prevent heat affected zone, then groove shape quality is improved, but processing efficiency decreases
Solution Approach 1:
The patent applies local quality by implementing wider beam spacing (50μm or more) only in specific regions where heat affected zone prevention is critical, rather than uniformly increasing spacing across all beams. This localized approach maintains groove shape accuracy where needed while preserving processing efficiency through tighter spacing in less critical areas.
Solution Approach 2:
The patent selectively changes the beam spacing parameter to 50μm or more in specific beam pairs or regions to prevent HAZ and ensure proper groove geometry, while maintaining smaller spacings in other regions to preserve processing efficiency. This selective parameter modification resolves the contradiction between quality and productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables high-efficiency and high-speed groove forming with minimal HAZ, uniform bottom surfaces, and a lowermost groove width of 75% or more of the uppermost width, achieving the desired groove shape.
Implementation Method 1
a multi-beam generator configured to split the laser beam into a plurality of sub-laser beams
Implementation Method 2
a focusing lens unit configured to focus the plurality of sub-laser beams on a processing object
Data Source
AI summary
A groove forming apparatus includes a laser light source configured to emit a laser beam, a multi-beam generator configured to split the laser beam into a plurality of sub-laser beams, a focusing lens unit configured to focus the plurality of sub-laser beams on a processing object, a first telecentric lens provided between the multi-beam generator and the focusing lens unit, and a second telecentric lens provided between the first telecentric lens and the focusing lens unit.