Hall Element Mitigating Current Concentration via Penetrating Conductor
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Solution Overview
Problem
Conventional Hall elements experience current concentration at the lower end of the contact, leading to variations in output Hall voltage due to the design of the magnetosensitive portion and electrode connections.
Innovation Solution
A Hall element design featuring a substrate with a magnetosensitive portion, an insulating film, and a conductive portion that extends from the peripheral region to the central region, penetrating the insulating film and being electrically connected to the magnetosensitive portion, with at least part of the conductive portion extending below the insulating film, thereby reducing current concentration and stabilizing the output voltage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the contact is designed to connect the magnetosensitive portion and electrode pad in conventional Hall elements, then the electrical connection is established, but current concentration occurs at the lower end of the contact causing variation in output Hall voltage
Solution Approach 1:
The conductive portion extends not only horizontally from the peripheral region toward the central region but also vertically by penetrating the insulating film. This three-dimensional configuration distributes the current path across multiple dimensions, preventing current concentration at the lower end of the contact and stabilizing the output Hall voltage.
Solution Approach 2:
The insulating film serves as an intermediary layer between the magnetosensitive portion and the electrode pad. The conductive portion penetrates this insulating film to establish electrical connection, and the insulating film's presence helps distribute the current flow rather than allowing direct concentration at the contact interface.
2Reliability
If the conductive portion penetrates the insulating film and extends below it, then current concentration is mitigated, but the device structure becomes more complex
Solution Approach 1:
The conductive portion serves multiple functions simultaneously: it provides electrical connection between the magnetosensitive portion and electrode pad, acts as a current distribution pathway by penetrating the insulating film, and extends into the magnetosensitive portion to mitigate current concentration. This multi-functionality reduces the need for additional separate structures.
3Reliability
If the conductive portion extends from peripheral region to central region, then current concentration is reduced, but manufacturing precision requirements increase
Solution Approach 1:
The insulating film is formed first as a predetermined pattern before the conductive portion is created. This preliminary formation of the insulating film with its specific pattern provides a template that guides subsequent conductive portion formation, ensuring proper positioning and extending from peripheral to central regions while managing manufacturing precision requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively mitigates current concentration and 1/f noise, resulting in reduced variation in the output characteristics and improved reliability of the Hall element.
Implementation Method 1
a conductive portion which is formed on the insulating film, extends from a peripheral region of the magnetosensitive portion toward a central region of the magnetosensitive portion, penetrates the insulating film, and is electrically connected to the magnetosensitive portion
Implementation Method 2
Hall element having a contact for connecting a magnetosensitive portion and an electrode pad
Data Source
AI summary
A Hall element including a contact is provided. A Hall element is provided, including: a substrate; a magnetosensitive portion formed on the substrate; an insulating film formed on the magnetosensitive portion; and a conductive portion which is formed on the insulating film, extends from a peripheral region of the magnetosensitive portion toward a central region of the magnetosensitive portion, penetrates the insulating film, and is electrically connected to the magnetosensitive portion, wherein when observing a cross section passing through a center of the magnetosensitive portion in plan view and a portion at which the conductive portion is in contact with the magnetosensitive portion, at least a part of the conductive portion extends below the insulating film in the cross section.


