High Dynamic Range Image Sensor Attenuation Layer Design

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Solution Overview

Problem

High dynamic range (HDR) image sensors with big-small pixel schemes face issues of increased cross talk and non-uniform angular response due to thick attenuation layers, which degrade optical performance.

Innovation Solution

Implementing a thin attenuation layer with materials like TiN, Al2O3, AlCu, Cu, Ti, Ta, Ag, W, TiO2, ZrO2, TaO, SiO2, SiN, SiNO, or HfOx, with a thickness in the order of nanometers, and a coating layer with a lower refractive index to reduce cross talk and improve angular performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a thick attenuation layer is used to improve small pixel performance, then light blocking capability is improved, but cross talk between adjacent pixels increases and angular response uniformity deteriorates

Engineering Contradiction:
Improvelight blocking capabilityVSAvoidcross talk between adjacent pixels
Core Design Contradiction:
Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

The patent divides the attenuation structure into multiple segments: a thin attenuation layer (first thickness) and an extended isolation structure (second thickness greater than first thickness). This segmentation allows the thin layer to provide sufficient light blocking for small pixels while the extended isolation structure specifically targets cross-talk reduction between adjacent pixels without compromising angular response uniformity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different attenuation characteristics to different regions: the thin attenuation layer provides uniform light blocking across the pixel array, while the extended isolation structure is specifically positioned between adjacent pixels to provide localized cross-talk reduction. This local differentiation resolves the contradiction by addressing each issue with a tailored solution.

Inventive Principle:
Principle #3Local quality

2Object-affected harmful factors

If a thick attenuation layer is used to improve small pixel performance, then light blocking capability is improved, but angular response uniformity deteriorates

Engineering Contradiction:
Improvelight blocking capabilityVSAvoidangular response uniformity
Core Design Contradiction:
Object-affected harmful factorsVSManufacturing precision

Solution Approach 1:

The patent segments the attenuation function into a thin uniform attenuation layer and an extended isolation structure. The thin layer maintains uniform angular response across all pixels, while the extended isolation structure is configured to not interfere with the angular response characteristics, thus preserving uniformity while providing sufficient light blocking.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the thickness parameter from a single thick layer to a dual-layer configuration with different thicknesses (first thickness for attenuation, second thickness greater than first for isolation). This parameter differentiation allows the system to achieve adequate light blocking without the angular response degradation caused by uniformly thick layers.

Inventive Principle:
Principle #35Parameter changes

3Object-generated harmful factors

If a thin attenuation layer is used to reduce cross talk and improve angular response, then cross talk is reduced and angular response uniformity is improved, but light blocking capability may be insufficient

Engineering Contradiction:
Improvecross talk between adjacent pixelsVSAvoidlight blocking capability
Core Design Contradiction:
Object-generated harmful factorsVSObject-affected harmful factors

Solution Approach 1:

The patent segments the attenuation function into two parts: the thin attenuation layer (first thickness) provides cross-talk reduction and maintains angular response uniformity, while the extended isolation structure (second thickness greater than first thickness) compensates for light blocking capability. This segmentation allows each component to optimize for its specific function.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The extended isolation structure serves multiple functions: it provides additional light blocking to compensate for the reduced thickness, maintains cross-talk isolation between adjacent pixels, and preserves angular response uniformity. This multi-functionality resolves the contradiction by making the isolation structure responsible for both attenuation and isolation.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Significantly reduces optical cross talk between adjacent pixels and enhances uniformity in angular performance, thereby improving the overall optical performance of HDR cameras.

Implementation Method 1

an extra attenuation layer is usually disposed over the small pixels to block a portion of the light from reaching the small pixels

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Implementation Method 2

a coating layer with a lower refractive index to reduce cross talk and improve angular performance

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS10665626B2High dynamic range image sensors
Publication Date: 2020.05.26 OMNIVISION TECHNOLOGIES INC
  • US10665626B2 patent drawing
  • US10665626B2 patent drawing
  • US10665626B2 patent drawing

AI summary

An image sensor comprises a first photodiode and a second photodiode having a smaller full-well capacitance than the first photodiode, wherein the second photodiode is adjacent to the first photodiode; a first micro-lens is disposed above the first photodiode and on an illuminated side of the image sensor; a second micro-lens is disposed above the second photodiode and on the illuminated side of the image sensor; and a coating layer disposed on both the first and second micro-lens, wherein the coating layer forms a flat top surface on the second micro-lens and a conformal coating layer on the first micro-lens.