Temperature Control in Heat Treatment Apparatus with Broken Sensor
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Solution Overview
Problem
Heat treatment apparatuses face temperature control fluctuations when a temperature detection element breaks, as existing methods fail to accurately account for the inter-regional temperature effects, leading to substrate temperature instability during processing.
Innovation Solution
A method and apparatus that utilize a control unit to adjust heating rates based on temperature detection values from multiple elements, employing a Kalman filter to estimate temperatures of broken elements, ensuring continuous temperature control without significant fluctuations by using a first estimation algorithm for abnormal situations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a broken temperature detection element is replaced by switching to another detection element or using calculation values from a dynamic model, then temperature control can continue, but the temperature control precision deteriorates due to not accounting for inter-regional temperature effects
Solution Approach 1:
The patent implements feedback control by using the estimation algorithm to continuously monitor and adjust for temperature deviations. When a detection element breaks, the system uses temperature data from adjacent regions to estimate the broken element's temperature, creating a feedback loop that maintains accurate temperature control without manual intervention or loss of precision.
Solution Approach 2:
The patent introduces an estimation algorithm as an intermediary between the broken detection element and the control system. This algorithm mediates by calculating the temperature of the broken element based on data from functioning elements, allowing the system to continue operating with full precision as if the original element were still functional.
2Measurement precision
If temperature detection elements are increased in number to improve monitoring, then measurement precision improves, but device complexity increases
Solution Approach 1:
The patent creates a virtual copy of the broken temperature detection element through the estimation algorithm. Instead of physically installing additional detection elements, the system generates a calculated representation of the missing element's temperature based on data from adjacent regions, maintaining full monitoring capability without physical duplication.
Solution Approach 2:
The patent changes the parameter representation from direct physical measurement to calculated estimation. By transforming the temperature data from the broken element into an estimated value derived from adjacent elements, the system maintains the same information quality without adding physical components.
Data Source
AI summary
Provided is a method of controlling temperatures of objects to be heated in a heating unit by adjusting a heating rate of each of a plurality of heating elements, based on temperature detection values detected at a plurality of temperature detection elements, wherein the plurality of temperature detection elements are positioned at different positions and the plurality of heating elements are positioned at different positions. The method includes estimating a temperature of each of the plurality of temperature detection elements by using a first estimation algorithm when one of the plurality of temperature detection elements is broken, based on the temperature detection values of the temperature detection elements excluding the broken temperature detection element, and controlling the temperatures of the objects to be heated based on the estimated temperatures.