Heater Assembly Sealing for Process Gap Control in Batch Chambers

Solution Overview

Problem

Batch processing chambers face challenges in maintaining consistent gap alignment between substrate supports and gas distribution assemblies, leading to deviations in processing gaps and volumes, which affect thermal uniformity and repeatability, often requiring complex and costly motorized leveling systems prone to wear and tear.

Innovation Solution

The integration of a heater assembly with a thermal shield and O-ring leveling system, which includes a shield plate and shaft, provides cost-effective gap control and thermal isolation, maintaining vacuum integrity and reducing the need for complex motorized systems by using fluid seals and adjustable components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If motorized leveling systems are used for heater alignment, then gap consistency and thermal uniformity are improved, but device complexity and maintenance requirements increase

Engineering Contradiction:

Improvegap consistencyVSAvoidsystem complexity

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces motorized leveling systems with a passive mechanical alignment system using tapered alignment pins and adjustable heater positioning mechanisms. This substitution eliminates motors, sensors, and control systems while maintaining gap consistency through precise mechanical interfaces and adjustable mounting structures that allow heater repositioning without power components.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs simple, replaceable mechanical components such as alignment pins, shims, and adjustable mounting brackets instead of expensive motorized systems. These components are designed to be inexpensive and easily replaceable, reducing both initial system cost and long-term maintenance expenses while achieving the required alignment precision.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

2Manufacturing precision

If motorized leveling systems are used for heater alignment, then gap consistency and thermal uniformity are improved, but reliability decreases due to wear and tear

Engineering Contradiction:

Improvegap consistencyVSAvoidsystem reliability

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The patent replaces motorized leveling systems with a passive mechanical alignment system using tapered alignment pins and adjustable heater positioning mechanisms. This substitution eliminates motors, sensors, and control systems while maintaining gap consistency through precise mechanical interfaces and adjustable mounting structures that allow heater repositioning without power components.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The mechanical alignment system is designed to be self-aligning through tapered pins and self-adjusting mounting structures that automatically compensate for minor misalignments. The system requires no external power, control, or adjustment mechanisms during operation, eliminating wear-prone components while maintaining consistent heater positioning and gap uniformity throughout the chamber.

Inventive Principle:

Principle #25Self-service

3Manufacturing precision

If complex motorized systems are used, then gap control precision is improved, but cost increases

Engineering Contradiction:

Improvegap control precisionVSAvoidsystem cost

Core Design Contradiction:

Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent replaces motorized leveling systems with a passive mechanical alignment system using tapered alignment pins and adjustable heater positioning mechanisms. This substitution eliminates motors, sensors, and control systems while maintaining gap consistency through precise mechanical interfaces and adjustable mounting structures that allow heater repositioning without power components.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs simple, replaceable mechanical components such as alignment pins, shims, and adjustable mounting brackets instead of expensive motorized systems. These components are designed to be inexpensive and easily replaceable, reducing both initial system cost and long-term maintenance expenses while achieving the required alignment precision.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances thermal uniformity and gap control, reducing maintenance needs and improving process repeatability while maintaining vacuum integrity, thus increasing the efficiency and reliability of batch processing chambers.

Implementation Method 1

using fluid seals and adjustable components

Methodology Applied

Scientific EffectFluid seal:

Implementation Method 2

heater assemblies comprising integrated thermal isolation shields

Methodology Applied

Scientific EffectThermal isolation: Thermal Insulation

Data Source

PatentUS12020957B2Heater assembly with process gap control for batch processing chambers

Publication Date: 2024.06.25 APPLIED MATERIALS INC

AI summary

A heater assembly having a top seal and a second seal configured to account for deviation in processing heights and motor runoff of a heater standoff. The top seal is positioned between a shield plate and a top plate and the bottom seal is positioned between a heater mounting base and the heater standoff.