Heater Element Isolation Circuit for Substrate Processing Systems
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Solution Overview
Problem
In substrate processing systems, arcing occurs between the substrate and the substrate support due to current leakage from heating elements, leading to degradation and damage, which reduces processing yields and increases costs.
Innovation Solution
A power supply circuit with an isolation circuit, including a coupled inductor or transformer, is used to convert and isolate the voltage supplied to the heating elements, preventing them from being grounded and minimizing arcing by employing high-speed switching and AC-DC converters to provide power to the heating elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If heating elements are directly connected to ground for stable power supply, then power supply stability is improved, but arcing occurs between substrate and substrate support causing damage
Solution Approach 1:
An isolation circuit is introduced as an intermediary component between the heating element power supply and ground. This isolation circuit includes a transformer or coupled inductor that electrically couples the primary and secondary sides while preventing direct ground connection, thus eliminating the arcing path while maintaining power supply stability.
2Object-affected harmful factors
If isolation circuit is added to prevent arcing, then arcing damage is reduced, but device complexity increases
Solution Approach 1:
The isolation circuit is designed to perform multiple functions simultaneously: it provides galvanic isolation to prevent arcing, transforms voltage levels to match heating element requirements, and maintains power supply stability. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in device complexity.
3Device complexity
If traditional grounded power supply is used, then device complexity is low, but processing yield decreases due to arcing
Solution Approach 1:
The isolation circuit transforms the potentially harmful effect of electrical discharge by redirecting it through the transformer's magnetic coupling rather than direct conduction. The magnetic field serves as a beneficial intermediary that transfers energy without creating arcing paths, thus converting what would be a harmful direct connection into a safe indirect coupling that protects substrates and improves processing yield.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively isolates the heating elements from earth ground, reducing arcing and allowing for smaller, cost-effective power supply circuits while maintaining efficient temperature control in substrate processing systems.
Implementation Method 1
an isolation circuit including one of a coupled inductor or a transformer. The one of the coupled inductor or the transformer is configured to convert the first alternating current voltage to and second alternating current voltage and isolate the one or more heating elements from an earth ground
Data Source
AI summary
A substrate processing system includes a substrate support and a power supply circuit. The substrate support is configured to support a substrate, wherein the substrate support comprises one or more heating elements. The power supply circuit includes: a direct current-to-alternating current converter configured to convert a first direct current voltage to a first alternating current voltage, where the direct current-to-alternating current converter comprises at least one switch; and an isolation circuit comprising one of a coupled inductor or a transformer. The one of the coupled inductor or the transformer is configured to convert the first alternating current voltage to and second alternating current voltage and isolate the one or more heating elements from an earth ground. The power supply circuit is configured to provide an output voltage to the one or more heating elements based on the second alternating current voltage.