Heating Light Source Cooling Channels for Uniform LED Irradiation
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Solution Overview
Problem
Existing heating light source devices using LED elements for semiconductor processing suffer from uneven irradiation and heating due to temperature differences among the LED elements, leading to uneven brightness and accelerated degradation, which increases maintenance costs.
Innovation Solution
A heating light source device with a light source section comprising multiple light-emitting element areas, each with independent cooling channels connected in parallel, allowing direct cooling medium supply to minimize temperature variation among elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single channel cooling mechanism is used for LED elements, then the cooling structure is simple, but significant temperature difference occurs between upstream and downstream LED elements causing uneven brightness
Solution Approach 1:
The single cooling channel is divided into multiple independent cooling channels, each serving a specific region of LED elements. This segmentation allows each channel to cool its corresponding LED elements uniformly, preventing temperature differences and brightness non-uniformity while maintaining reasonable structural complexity
Solution Approach 2:
Different cooling channels are configured with different flow rates based on the local heat generation characteristics of LED elements in different regions. This local quality approach ensures optimal cooling effectiveness for each region, achieving uniform brightness across all LED elements
2Power
If LED elements are operated at high temperature to increase output, then the heating effect is enhanced, but the service life of LED elements decreases due to accelerated degradation
Solution Approach 1:
The cooling system dynamically adjusts the flow rate of cooling medium as a parameter to optimize the balance between temperature control and LED lifespan. By maintaining LED operating temperature within an optimal range through parameter adjustment, the system achieves both sufficient heating output and extended LED service life
3Temperature
If cooling medium flow rate is increased to improve cooling effectiveness, then temperature control is enhanced, but energy consumption increases
Solution Approach 1:
The system optimizes the flow rate parameter of cooling medium to achieve the minimum energy consumption required for effective temperature control. By carefully adjusting this parameter, the system maintains LED elements at optimal temperatures while minimizing energy consumption of the cooling medium circulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution suppresses uneven irradiation and brightness variation, prolongs LED element lifespan, and reduces maintenance costs by ensuring uniform cooling across the light-emitting elements.
Implementation Method 1
The cooling medium that flows through the channel while absorbing the heat generated by the LED elements becomes warmer toward the downstream due to the absorbed heat
Data Source
AI summary
A heating light source device includes a light source section having a plurality of light-emitting element areas that contain a plurality of light-emitting elements, each of the light-emitting element areas being separated from each other; a cooling unit disposed in contact with the light source section; a plurality of cooling channels formed inside the cooling unit and disposed independently each other; a first main channel connected with one end of each of the cooling channels; and a second main channel connected with the other end of each of the cooling channels, and each of the cooling channels is formed at an internal position of the cooling unit corresponding to the light-emitting element areas.