HEMT Gate-Drain Insulating Layer for Current Collapse Prevention

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Solution Overview

Problem

Lattice defects in III-V semiconductor compounds lead to electron trapping, causing current collapse in high electron mobility transistors (HEMTs), which affects device reliability.

Innovation Solution

An insulating layer is introduced between the drain and gate electrodes, with electrodes on this layer applied a voltage to attract and remove trapped electrons, preventing current collapse by neutralizing them when the HEMT is in the off state.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If III-V semiconductor compounds are used to form HEMT channels, then high electron mobility and high frequency performance are achieved, but lattice defects cause electron trapping and current collapse

Engineering Contradiction:
Improveelectron mobilityVSAvoiddevice reliability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

An insulating layer is introduced as an intermediary between the drain electrode and gate electrode. This insulating layer contains trapping sites that capture electrons before they can be trapped by lattice defects in the semiconductor channel, thereby mediating the interaction between electrons and defects to prevent current collapse while maintaining high electron mobility

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention converts the harmful effect of lattice defects into a beneficial mechanism by using the insulating layer's trapping sites to deliberately capture electrons. This transforms the unavoidable presence of defects into a controlled electron management system that actually improves device reliability by preventing harmful electron trapping in the channel

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Reliability

If electrons are trapped in lattice defects during device operation, then current collapse occurs, but introducing an insulating layer with electrodes increases device complexity

Engineering Contradiction:
Improvecurrent stabilityVSAvoiddevice structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The insulating layer serves multiple functions simultaneously: it acts as an electron trapping medium to prevent current collapse, provides a substrate for additional electrodes that can be used for electron removal, and maintains the electrical insulation between drain and gate. This multi-functionality justifies the added structural element by delivering multiple benefits from a single component

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If numerous electrodes are added on the insulating layer to remove trapped electrons, then current collapse is prevented, but manufacturing complexity increases

Engineering Contradiction:
Improvecurrent collapse preventionVSAvoidfabrication process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The insulating layer with its electron-trapping capability is incorporated into the device structure during the manufacturing process, before the device begins operation. This preliminary preparation of electron management capability simplifies subsequent operation, as the structure is already configured to prevent current collapse without requiring complex real-time control systems

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively removes trapped electrons, ensuring stable current flow in HEMTs by neutralizing them before the device is turned on, thereby enhancing the reliability and performance of HEMTs.

Implementation Method 1

electrons are often trapped in these lattice defects during a device operation

Methodology Applied
Scientific EffectElectron trapping: Electrostatic Induction

Implementation Method 2

A two-dimensional electron gas (2DEG) may be generated by the piezoelectric property of the GaN-based materials

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS11830941B2High electron mobility transistor and method of fabricating the same
Publication Date: 2023.11.28 UNITED MICROELECTRONICS CORP
  • US11830941B2 patent drawing
  • US11830941B2 patent drawing
  • US11830941B2 patent drawing

AI summary

A high electron mobility transistor includes a first III-V compound layer. A second III-V compound layer is disposed on the first III-V compound layer, wherein the composition of the first III-V compound layer and the second III-V compound layer are different from each other. A source electrode and a drain electrode are disposed on the second III-V compound layer. A gate electrode is disposed on the second III-V compound layer between the source electrode and the drain electrode. An insulating layer is disposed between the drain electrode and the gate electrode and covering the second III-V compound layer. Numerous electrodes are disposed on the insulating layer and contact the insulating layer, wherein the electrodes are positioned between the gate electrode and the drain electrode and a distribution of the electrodes decreases along a direction toward the gate electrode.