High Frequency Test Apparatus Impedance Matching
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Solution Overview
Problem
Conventional high frequency withstand voltage tests for capacitive and inductive members in plasma processing apparatuses are inefficient and inaccurate, leading to potential damage to test objects and low measurement accuracy due to high current requirements and heat-related impedance changes, especially when using step-up transformers.
Innovation Solution
A test apparatus that includes a high frequency power source unit with a variable envelope output, a control unit for generating reversed taper-shaped high frequency pulses, and a monitor unit to accurately measure high frequency voltage dependency without damaging the test object, eliminating the need for step-up transformers and ensuring impedance matching for precise voltage application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If step-up transformers are used for high frequency withstand voltage tests, then high voltage can be achieved, but the apparatus becomes bulky, expensive, and causes heat-related impedance changes that reduce measurement accuracy
Solution Approach 1:
The patent extracts and eliminates the step-up transformer from the test apparatus, replacing it with a direct high frequency power source that outputs the required high voltage without transformation. This removes the bulky, expensive transformer component while achieving the same high voltage output capability through a more compact solid-state power source design.
Solution Approach 2:
The patent replaces the mechanical/electromagnetic transformation system (step-up transformer) with an electronic generation system (high frequency power source with solid state amplifier). This substitution eliminates the need for large magnetic cores and windings, reducing apparatus size and cost while improving measurement accuracy by eliminating heat-related impedance changes in transformer components.
2Power
If step-up transformers are used for testing, then high voltage can be applied to test objects, but high current requirements cause heat generation that changes impedance and reduces measurement accuracy
Solution Approach 1:
The patent replaces the transformer-based voltage multiplication method with a direct high frequency power source that generates the required high voltage electronically. This eliminates the high current flow through transformer windings that causes heat generation and impedance changes, thereby maintaining measurement accuracy. The solid state power source delivers high voltage with controlled current, preventing thermal effects that would alter the test object's impedance characteristics.
Solution Approach 2:
The patent changes the operational parameters by using high frequency signals (e.g., 13.56 MHz) instead of low frequency transformer operation. This frequency change allows for efficient power transfer with lower current requirements, reducing I²R losses and heat generation. The high frequency operation also enables the use of smaller parasitic capacitances and inductances, maintaining measurement accuracy while achieving the required voltage levels for testing capacitive and inductive components.
3Productivity
If conventional testing methods are used, then testing can be performed, but the process is inefficient and may damage test objects due to uncontrolled voltage application
Solution Approach 1:
The patent implements periodic pulsed voltage application instead of continuous voltage exposure. The high frequency power source delivers voltage in controlled pulses with adjustable duty cycles, allowing the test object to be subjected to stress only when necessary for measurement. This periodic action increases testing efficiency by reducing total exposure time while maintaining reliability through controlled stress levels that prevent cumulative damage to capacitive and inductive components.
Solution Approach 2:
The patent incorporates feedback mechanisms through impedance monitoring during the testing process. The system continuously measures the impedance of the test object and adjusts the applied voltage in real-time based on these measurements. This feedback control prevents over-voltage conditions that could damage the test object while ensuring sufficient voltage is applied to obtain accurate measurements, thereby improving both testing efficiency and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient and accurate testing of high frequency voltage dependency without damaging the test object, improving stability and reproducibility by applying defined high frequency voltage waveforms and eliminating the need for expensive and bulky transformers.
Implementation Method 1
a high frequency power source unit configured to output a high frequency wave having a predetermined frequency in a variable envelope
Implementation Method 2
a matching unit configured to establish an impedance matching between the high frequency power source unit and the test object
Data Source
AI summary
A test apparatus for efficiently and accurately testing a high frequency voltage dependency of an impedance of a test object without damaging the test object. The test apparatus includes a high frequency power source unit, a reference waveform generator, a matching device, an oscilloscope, a control panel, and a main control unit. The test apparatus may boost a high frequency pulse output at a relatively low power from the high frequency power source unit to a voltage required for a high frequency withstand voltage test to be applied to a test object in a state where impedance matching is performed between the high frequency power source unit and the test by the matching device, that is, under a tuned state. Whether the waveform of the voltage applied to the test object is a defined waveform may be concisely monitored and observed by the oscilloscope.