High Voltage Connector Pad-Plate Equipotential Design
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
High voltage electrical components in lithographic apparatuses and other applications are prone to electrical breakdown, which can cause damage, electromagnetic interference, and pose health risks due to the inability of existing connectors and connection systems to effectively withstand high voltages.
Innovation Solution
A high voltage electrical connector system comprising a laminate with an outer shield layer, outer insulating layer, high voltage plate, inner insulating layer, and high voltage supply pad, where the pad is smaller than the plate and positioned substantially wholly within it, creating a region of equipotential to reduce electric field strength and prevent breakdown.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If high voltage is applied to electrical components, then the power and functionality are improved, but electrical breakdown occurs causing damage and electromagnetic interference
Solution Approach 1:
The patent applies the equipotentiality principle by designing a connector where the high voltage pad is substantially wholly contained within the high voltage plate when viewed from above. This configuration ensures that the entire connector structure is at the same high voltage potential, eliminating potential differences that would create strong electric fields. The outer insulating layer and shield layer further enforce this equipotential condition, preventing electrical breakdown by ensuring uniform voltage distribution across all exposed surfaces.
2Device complexity
If conventional electrical connectors are used at high voltage, then the device complexity is reduced, but electrical breakdown and electromagnetic interference increase
Solution Approach 1:
The patent converts the potentially harmful exposed edges of the high voltage pad into a beneficial configuration. By ensuring the pad is contained within the plate and providing extensive insulating coverage, the design transforms what would be breakdown-prone edge regions into protected, controlled interfaces. The shield layer and insulating materials that might seem to add complexity actually convert the harmful exposed edges into protected interfaces, eliminating electromagnetic interference while maintaining a relatively simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the likelihood of electrical breakdown, allowing for the safe use of high voltages while minimizing damage and interference, thereby enhancing the reliability and safety of electrical connections in high voltage applications.
Implementation Method 1
creating a region of equipotential to reduce electric field strength and prevent breakdown
Implementation Method 2
an outer insulating layer... an inner insulating layer
Implementation Method 3
an outer shield layer
Data Source
AI summary
An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.