Holding Pad With Removable Silicone Adsorption Template
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Solution Overview
Problem
Conventional holding pads with templates are costly and difficult to use efficiently due to the need for multiple pads for different work pieces and the risk of polishing burns and scratches from abrasive grains entering the joint interface, as the templates are not easily removable and become worn.
Innovation Solution
A holding pad with a removable template featuring an adsorption layer composed of crosslinked silicone, which allows for flexible template attachment and easy cleaning, preventing polishing burns and scratches by providing a high shear force for lateral stability and low separation force for vertical attachment and removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the template is firmly joined to the holding pad using conventional adhesive methods, then the template cannot be arbitrarily attached and removed, but this increases the cost of polishing operation and reduces flexibility
Solution Approach 1:
The patent applies a silicone-based adsorption layer that provides dynamic bonding characteristics - strong enough to hold the template firmly during polishing operation, but allows for easy attachment and removal when needed. This dynamic property resolves the contradiction between firm joining and flexible reuse.
Solution Approach 2:
The patent changes the chemical composition parameter of the adhesive layer from conventional adhesives to silicone-based adsorption layer, which fundamentally alters the bonding characteristics to achieve both strong holding strength and easy removability, enabling template reuse.
2Strength
If the template is firmly joined to the holding pad, then the template cannot be removed for cleaning, but abrasive grains enter the joint interface causing polishing burn and scratch
Solution Approach 1:
The silicone-based adsorption layer enables the template to be firmly held during polishing yet easily removed for cleaning, preventing abrasive grain accumulation that causes polishing burn and scratch while maintaining operational stability.
Solution Approach 2:
The patent enables the template to be removed, cleaned of abrasive grains, and reused multiple times. This recovering approach prevents polishing defects while extending template life, resolving the contradiction between firm joining and cleaning accessibility.
3Reliability
If multiple holding pads are prepared for different work pieces, then each work can be properly constrained, but the cost for acquiring and storing them is increased
Solution Approach 1:
The patent makes the holding pad universal by enabling easy template attachment and removal. A single holding pad can accommodate different templates for different work pieces, eliminating the need for multiple dedicated pads while maintaining proper constraint accuracy.
Solution Approach 2:
The dynamic bonding特性 of the silicone-based adsorption layer allows one holding pad to serve multiple functions by easily changing templates, reducing the quantity of holding pads needed while maintaining reliability for different work pieces.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The removable template holding pad allows for efficient and cost-effective polishing operations, extending the life of the pad by preventing wear and scratches, and enabling the reuse of templates, thus reducing manufacturing costs and improving polishing quality.
Implementation Method 1
the template fixing portion has an adsorption layer for adsorbing and fixing the template on a surface of the template fixing portion
Implementation Method 2
providing a high shear force for lateral stability and low separation force for vertical attachment and removal
Data Source
AI summary
The present invention is a holding pad including a holding layer for holding a member to be polished, in which the holding layer includes on a part of a surface thereof a template fixing portion for sticking a template for preventing lateral displacement of the member to be polished, the template fixing portion has on a surface thereof an adsorption layer for adsorbing and fixing the template the template fixing portion, and the adsorption layer is formed of a composition which is formed by crosslinking a silicone composed of a predetermined siloxane.