Hollow RF Feed Tube with Nested DC Conductors
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Solution Overview
Problem
Substrate processing systems face issues with asymmetric RF power behavior due to conductors providing DC power, which disrupt coaxial RF symmetry, leading to inconsistent results across different processing chambers.
Innovation Solution
A hollow RF feed tube system with a feed rod and outer tube configuration, where conductors for DC power are routed through the feed rod and supported by insulators, maintaining uniform spacing to prevent disruption of RF symmetry, allowing for repeatable DC power delivery without affecting RF power distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conductors for DC power are routed through the feed rod, then DC power can be delivered to components, but RF symmetry is disrupted causing asymmetric RF power behavior
Solution Approach 1:
The patent routes DC power conductors through the hollow interior of the feed rod, nesting the DC power delivery function within the RF feed structure. This allows both RF and DC power to be delivered through the same feed tube without external conductor routing that would disrupt RF symmetry
Solution Approach 2:
The patent introduces insulators as intermediary components between the DC conductors and the RF feed rod walls. These insulators prevent direct contact between DC conductors and the RF structure, minimizing RF symmetry disruption while still allowing DC power delivery
2Adaptability or versatility
If multiple conductors are routed through the feed rod, then multiple DC power lines can be provided, but the structural complexity increases
Solution Approach 1:
Multiple DC power conductors are nested within the hollow feed rod structure, with each conductor independently routed through the feed rod interior. This consolidates multiple power delivery functions within a single structural element rather than requiring separate external routing for each conductor
Solution Approach 2:
The feed rod is designed as a multi-functional component that simultaneously serves as an RF power conductor, a structural support, and a conduit for multiple DC power conductors. This universal design reduces overall system complexity by combining multiple functions into one component
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures consistent and repeatable DC power delivery to substrate processing systems without disrupting RF symmetry, enhancing the reliability and uniformity of processes like etching and deposition across various substrate processing systems.
Implementation Method 1
The feed rod is arranged to provide radio frequency power to the substrate processing system
Implementation Method 2
the outer tube provides a return for the radio frequency power
Implementation Method 3
The conductor is arranged to provide electrical power to at least one component of the substrate processing system
Data Source
AI summary
A feed tube for a substrate processing system includes an outer tube and a feed rod. The feed rod is arranged within the outer tube. The feed rod is arranged to provide radio frequency power to the substrate processing system and the outer tube provides a return for the radio frequency power. At least one conductor is routed within the feed rod. The conductor is arranged to provide electrical power to at least one component of the substrate processing system separate from the radio frequency power provided by the feed rod.