Holweck Vacuum Pump Barrier Stage for Aggressive Gas Isolation
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Solution Overview
Problem
Existing vacuum pumps face challenges in protecting sensitive components from aggressive gases without using barrier gases, which are undesirable or prohibited in certain applications.
Innovation Solution
A vacuum pump design featuring a Holweck pumping stage with distinct stator sections and a gas outlet between them, where the second stator section acts as a barrier to prevent gas entry into sensitive areas and efficiently evacuates accumulated gas, utilizing a collecting groove and outlet channel for effective gas discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If barrier gas is introduced to protect sensitive components from aggressive gases, then component protection is improved, but device complexity and operational restrictions increase
Solution Approach 1:
The pump housing is divided into a first pump chamber and a second pump chamber separated by a partition wall. The second chamber acts as a protective barrier zone that prevents aggressive gases from reaching sensitive components in the first chamber, eliminating the need for additional barrier gas systems while maintaining component protection
Solution Approach 2:
The second pump chamber serves as an intermediary barrier zone between the aggressive gas environment and the sensitive components. This intermediate chamber with its own pumping system creates a protective buffer that shields the first chamber without requiring external barrier gases
2Device complexity
If a single gas outlet is used in the Holweck pump stage, then device complexity is reduced, but gas accumulation in protected areas may occur
Solution Approach 1:
The Holweck stator is divided into a first pump-active stator section and a second pump-active stator section with different groove configurations. The second section has grooves oriented to pump gas axially toward the gas outlet, creating a local pumping effect that prevents gas accumulation in the protected area while maintaining a simple single-outlet structure
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures reliable protection of sensitive components by preventing gas ingress and efficiently removing accumulated gas, even without the use of barrier gases, while maintaining pumping efficiency.
Implementation Method 1
The Holweck stator (22) has a first pump-active stator section (22A) and a second pump-active stator section (22B) arranged coaxially... the Holweck thread in the region of the first pump-active stator section... generates a pumping action
Implementation Method 2
the Holweck thread in the region of the second pump-active stator section is designed such that the pumping action generated is directed opposite to that generated by the Holweck thread in the region of the first pump-active stator section... the second stator section then acts as a barrier stage, preventing the gas being pumped from entering the second stator section or even beyond it in an axial direction
Data Source
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AI summary
The present invention relates to a vacuum pump, in particular a turbomolecular pump, with an inlet, an outlet, and a pumping system comprising at least one Holweck pumping stage, including a Holweck thread formed by Holweck grooves in a Holweck stator, which, together with a Holweck rotor rotating about an axis of rotation during operation of the vacuum pump, generates a pumping action. The Holweck stator has a first pump-active stator section and a second pump-active stator section, which are arranged coaxially. The Holweck stator has a gas outlet of the Holweck pumping stage, which is arranged axially between the first pump-active stator section and the second pump-active stator section and which is in fluid communication with the outlet of the vacuum pump.