A split Holweck stator creates a barrier stage and mid-stage outlet to block aggressive gas ingress and evacuate trapped gas without barrier gas.
An inclined side wall on a Holweck groove enables vertical milling of narrow deep features in vacuum pumps.
Segmented dual inlet pump stages boost gas evacuation speed by 50 percent while maintaining compact installation space and stable rotor dynamics.
An intermediary sealing member blocks water from reaching aluminum wire connections, resolving corrosion risks caused by mold gaps.
A multi-inlet vacuum pump directs fluid streams through rotor disk passages to combine within the second pumping device.