Multi-inlet Vacuum Pump Rotor Disk Flow Channels

The patent segments the fluid stream combination process by separating where the first and second fluid streams mix. Instead of combining them directly at the intermediate inlet, the first fluid stream is conveyed through a passage in the rotor disk of the second pumping device to a mixing area between rotor disks, while the second fluid stream enters separately at the intermediate inlet. This segmentation allows each stream to be handled independently until the optimal mixing point, preserving partial pressure ratios and improving pumping efficiency.

The patent implements a nested structure where the passage for conveying the first fluid stream is integrated within the rotor disk of the second pumping device. The passage is formed as a through-opening in the rotor disk, allowing the first fluid stream to be conveyed through the rotating component itself. This nesting approach allows the system to achieve high pumping speeds without requiring excessively large rotor disk diameters, as the internal passage structure efficiently directs the fluid flow.

The rotor disk of the second pumping device serves multiple functions: it acts as a rotating component for pumping the second fluid stream, provides a passage for conveying the first fluid stream, and creates a mixing area between rotor disks where the two streams combine. This multi-functionality allows the system to maintain partial pressure ratios by separating the mixing location from the intermediate inlet while avoiding additional dedicated components, thus managing device complexity effectively.