Hybrid Ion Implantation Scanner for Beam Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current ion implantation systems face limitations in efficiently scanning ion beams due to space-charge effects in electric scanners and high power requirements in magnetic scanners, making it challenging to achieve a wide range of ion implants with varying energies and densities.
Innovation Solution
A hybrid ion implantation system that combines electric and magnetic scanning technologies, using a power delivery controller to select between electric and magnetic scanning modes based on ion beam properties, generating both electric and magnetic fields to optimize beam control and reduce space-charge blow-up.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If electric scanning is used to scan ion beams, then power consumption is reduced, but space-charge effects cause beam blow-up and reduced beam quality
Solution Approach 1:
The patent combines electric scanning and magnetic scanning into a hybrid system. The electric scanner handles low-energy beams where its low power consumption is advantageous, while the magnetic scanner handles high-energy beams where it maintains beam quality without space-charge effects. This merging allows the system to optimize power consumption across different operating conditions while maintaining reliable beam quality.
Solution Approach 2:
The system dynamically changes scanning parameters based on beam energy. A controller selects between electric and magnetic scanning modes depending on the ion beam energy level. For low-energy beams, electric scanning is activated; for high-energy beams, magnetic scanning is activated. This parameter change resolves the contradiction by adapting the scanning method to the specific operating conditions.
2Reliability
If magnetic scanning is used to scan ion beams, then beam quality is maintained without space-charge effects, but power consumption increases
Solution Approach 1:
The hybrid scanner merges electric and magnetic scanning capabilities, allowing the system to use magnetic scanning only when necessary (for high-energy beams) to maintain beam quality, while using electric scanning for low-energy beams to reduce power consumption. This selective merging resolves the contradiction by applying magnetic scanning's beam quality benefits only where needed.
Solution Approach 2:
The controller dynamically changes the scanning mode parameter based on beam energy detection. When beam energy exceeds a threshold, magnetic scanning is activated to maintain beam quality; when energy is below the threshold, electric scanning is used to minimize power consumption. This parameter adaptation resolves the power-quality trade-off.
3Adaptability or versatility
If a single ion implantation system is used for various implant applications, then system versatility is improved, but the system cannot efficiently handle both low-energy and high-energy ion beams with different scanning requirements
Solution Approach 1:
The hybrid scanner provides multi-functionality by incorporating both electric and magnetic scanning capabilities in a single system. This universal scanner can handle both low-energy and high-energy ion beams appropriately, maintaining scanning performance reliability across different energy ranges while improving system versatility.
Solution Approach 2:
The system dynamically adapts its scanning method based on the ion beam energy. The controller continuously monitors beam energy and switches between electric and magnetic scanning modes accordingly. This dynamic adaptation allows a single system to reliably handle varying scanning requirements across different implant applications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hybrid system enables efficient scanning of ion beams across a wide energy range, achieving high beam currents and uniform implantation densities while minimizing power consumption and space-charge effects, thus enhancing the versatility and efficiency of ion implantation processes.
Implementation Method 1
electric scanning, wherein a voltage is applied across two electrodes to create an electric field that diverts or alters the path of the ion beam
Implementation Method 2
magnetic scanning, wherein a magnetic field is generated through which the ion beam passes that diverts or alters the path of the ion beam
Data Source
AI summary
A hybrid scanner is disclosed that is capable of performing at least one of an electric and magnetic scanning of an ion beam. The hybrid scanner comprises a plurality of magnetic elements configured to generate a magnetic field across the ion beam for magnetic scanning, and a plurality of electric elements configured to generate an electric field proximate to the ion beam for electric scanning. A power delivery controller is coupled to at least one of the magnetic elements and at least one of the electric elements, and is configured to selectively provide power to the magnetic and electric elements.