Hybrid Aluminum Ion Source for Switching Ion Charge States
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing ion sources require multiple units and time-consuming switching to generate ions with different charges, such as singly and multicharged ions for materials like aluminum, due to the inefficiency of mechanisms for creating multicharged ions.
Innovation Solution
An ion source with a modular design featuring an insertable target holder and a solid target in the arc chamber, allowing for quick switching between modes to produce either single or multicharged ions by controlling the position of the target holder and the introduction of a halogen-containing gas, which etches and ionizes the dopant material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple ion sources are used to generate ions with different charges, then the ability to produce both singly and multicharged ions is improved, but the device complexity and cost increase
Solution Approach 1:
The ion source is designed with a removable target holder that can be exchanged to change the dopant material, enabling the same ion source to produce both singly charged ions (using solid dopant-containing compound) and multicharged ions (using vapor from solid dopant material). This multi-functionality eliminates the need for multiple separate ion sources while maintaining the ability to generate ions with different charges.
Solution Approach 2:
The target holder is designed to be removable and replaceable, allowing dynamic switching between different dopant materials during operation. This dynamic configuration enables the system to adapt between producing singly charged ions and multicharged ions as needed, providing operational flexibility without requiring multiple fixed ion sources.
2Adaptability or versatility
If multiple ion sources are used to generate ions with different charges, then the ability to produce both singly and multicharged ions is improved, but the cost increases
Solution Approach 1:
The ion source is designed with a removable target holder that can be exchanged to change the dopant material, enabling the same ion source to produce both singly charged ions (using solid dopant-containing compound) and multicharged ions (using vapor from solid dopant material). This multi-functionality eliminates the need for multiple separate ion sources while maintaining the ability to generate ions with different charges.
3Adaptability or versatility
If ion sources are switched between different modes, then the ability to produce ions with different charges is improved, but the time required increases
Solution Approach 1:
The target holder is designed to be removable and replaceable, allowing dynamic switching between different dopant materials during operation. This dynamic configuration enables the system to adapt between producing singly charged ions and multicharged ions as needed, providing operational flexibility without requiring multiple fixed ion sources.
Solution Approach 2:
Different dopant materials are pre-loaded into separate target holders before operation. When switching between ion types is needed, the appropriate pre-prepared target holder is simply exchanged into position, eliminating the need for time-consuming in-situ material changes or complex reconfiguration procedures.
4Ease of operation
If a porous surface is used in the target holder, then the ability to control dopant material passage is improved, but the device complexity increases
Solution Approach 1:
The target holder incorporates a porous surface that allows vapor from the solid dopant material to pass through while blocking liquid or molten dopant material. This porous structure provides automatic control over dopant delivery based on physical state, enabling precise operation without complex control mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and cost-effective operation of a single ion source capable of producing both single and multicharged ions, optimizing the use of limited dopant material and reducing the need for multiple ion sources and lengthy switching processes.
Implementation Method 1
The filament emits thermionic electrons, which are accelerated toward and heat the cathode, in turn causing the cathode to emit electrons into the arc chamber of the ion source
Implementation Method 2
through which vapors from the solid dopant material may enter the arc chamber
Implementation Method 3
The porous surface inhibits the passage of liquid or molten dopant material into the arc chamber
Implementation Method 4
introduction of a halogen-containing gas, which etches and ionizes the dopant material
Implementation Method 5
introduction of a halogen-containing gas, which etches and ionizes the dopant material
Data Source
AI summary
An ion source that is capable of different modes of operation is disclosed. The ion source includes an insertable target holder includes a hollow interior into which the solid dopant material is disposed. The target holder may a porous surface at a first end, through which vapors from the solid dopant material may enter the arc chamber. The porous surface inhibits the passage of liquid or molten dopant material into the arc chamber. The target holder is also constructed such that it may be refilled with dopant material when the dopant material within the hollow interior has been consumed. A solid target is also disposed in the arc chamber. When the insertable target holder is used, multicharged ions are created. When the insertable target holder is retracted, single charged ions are created by only etching the solid dopant-containing compound.