Hydraulic Probe Positioning for Low-Temperature Testing

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Solution Overview

Problem

Current low-temperature testing methods for integrated circuit devices face issues with moisture condensation and electromagnetic noise interference due to the need to open the testing chamber, which affects temperature control and testing accuracy.

Innovation Solution

A low temperature probing apparatus using a hydraulic stage to adjust probe positions within the chamber without opening it, eliminating the need for an electric stage and preventing electromagnetic noise, with a transparent window for observation and hydraulic controller for movement control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the testing chamber is opened to move the probe card or manipulator, then the device can be repositioned for testing, but moisture condenses into water droplets affecting temperature control and damaging the cooling mechanism

Engineering Contradiction:

Improveability to move probe cardVSAvoidtemperature control

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The patent replaces the traditional mechanical manipulator with a hydraulic stage system. The hydraulic stage uses fluid pressure instead of mechanical motors or actuators to move the probe card, allowing repositioning without opening the testing chamber. This substitution eliminates the source of electromagnetic noise while maintaining the ability to adjust probe positions for different testing scenarios.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs a hydraulic stage to retain and position the probe card within the isolated testing chamber. The hydraulic system uses incompressible fluid to transmit force, enabling precise movement of the probe card to different positions without requiring chamber access. This hydraulic mechanism operates entirely within the sealed environment, preventing moisture condensation issues.

Inventive Principle:

Principle #29Pneumatics and hydraulics

2Reliability

If an electrical stage is used to retain the probe card, then the device can be repositioned without opening the chamber, but electromagnetic noise deeply influences the accuracy of the testing result

Engineering Contradiction:

Improvetemperature controlVSAvoidtesting accuracy

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The patent replaces the electrical stage with a hydraulic stage system. By substituting electromagnetic actuators with hydraulic fluid-driven mechanisms, the system eliminates electromagnetic noise generation within the testing chamber. The hydraulic stage provides smooth, controlled movement of the probe card without introducing electrical interference that would compromise measurement accuracy.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Ease of operation

If the probe card is moved after the test environment is isolated again, then repositioning can be achieved, but the temperature drops further causing poor contact of the probes on the wafer

Engineering Contradiction:

Improveability to reposition probeVSAvoidprobe contact accuracy

Core Design Contradiction:

Ease of operationVSManufacturing precision

Solution Approach 1:

The patent enables the probe card to be positioned and adjusted before the testing chamber is sealed and cooled. The hydraulic stage allows all necessary repositioning and alignment operations to be completed while the chamber is still accessible but before temperature drops occur. Once positioned correctly, the chamber is sealed and cooling begins, ensuring probe-wafer contact is maintained throughout the testing process without further adjustments.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate low-temperature testing by maintaining chamber isolation, preventing moisture condensation and electromagnetic interference, and allowing precise probe positioning without power requirements.

Implementation Method 1

at least one hydraulic stage positioned on the platen and configured to retain at least one probe

Methodology Applied

Scientific EffectHydraulic pressure: Hydraulic Press

Data Source

PatentUS7791363B2Low temperature probing apparatus

Publication Date: 2010.09.07 VUETTE PTE LTD

AI summary

A low temperature probing apparatus comprises a housing, a device holder positioned in the housing and configured to receive at least one semiconductor device under test, a platen positioned on the housing, at least one hydraulic stage positioned on the platen and configured to retain at least one probe, a cover positioned on the platen and configured to form an isolation chamber with the hydraulic stage and the device holder positioned therein, and a hydraulic controller configured to control the movement of the hydraulic stage.