Hydrogen Peroxide Purification Using Electrodeionization Stages
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Solution Overview
Problem
Current methods for purifying hydrogen peroxide do not produce high-purity hydrogen peroxide efficiently, which can lead to defects in semiconductor wafer cleaning processes due to residual impurities.
Innovation Solution
A method involving a primary purification system, which can include distillation, resin, or reverse osmosis, followed by a secondary electrodeionization system to achieve high-purity hydrogen peroxide, effectively removing metal, anion, and organic impurities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional purification methods are used, then the purification process is simple, but the purity of hydrogen peroxide is insufficient leading to semiconductor defects
Solution Approach 1:
The purification system is divided into multiple sequential stages: a first purification unit (distillation or membrane separation) followed by a second purification unit (electrodeionization). This segmentation allows each unit to target specific impurity types, achieving high purity while managing system complexity through modular design
Solution Approach 2:
The patent employs electrodeionization which changes the operational parameters by applying electrical fields and using ion-exchange resins to selectively remove ionic impurities. This parameter change enables removal of metal ions at ppb levels that conventional thermal methods cannot achieve
2Manufacturing precision
If multiple purification steps are added to increase purity, then the purity of hydrogen peroxide improves, but the production efficiency and yield decrease
Solution Approach 1:
The patent replaces conventional mechanical/thermal purification methods with electrodeionization, an electrochemical process. This substitution achieves superior purification efficiency with higher yield because it operates at lower temperatures and avoids the material losses associated with repeated distillation
Solution Approach 2:
Ion-exchange resins serve as intermediaries in the electrodeionization process, facilitating selective removal of ionic impurities while allowing hydrogen peroxide to pass through. This intermediary mechanism enables high purity achievement without the need for excessive purification stages
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method achieves high-purity hydrogen peroxide with a high yield, preventing defects in semiconductor processes by significantly reducing impurity concentrations through a multi-step purification process.
Implementation Method 1
One of the primary purification system and the secondary purification system may include an electrodeionization system
Implementation Method 2
the method including an electrodeionization process
Implementation Method 3
the other one of the primary purification system and the secondary purification system may include at least one from among a distillation system
Implementation Method 4
a reverse osmosis system
Data Source
AI summary
The present invention relates to a method for purifying hydrogen peroxide, and more particularly, to a method including purifying a crude product of hydrogen peroxide using a primary purification system, and purifying a primarily purified hydrogen peroxide solution using a secondary purification system. One of the primary purification system and the secondary purification system includes an electrodeionization system, and the other one of the primary purification system and the secondary purification system includes at least one from among a distillation system, a resin system, a reverse osmosis system, and a combination system thereof.