Hydrogen Gas Sensor Structure for High Sensitivity Without Heating
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Solution Overview
Problem
Existing gas detecting elements require heating to 100° C. or higher to improve sensitivity for detecting hydrogen, resulting in high power consumption.
Innovation Solution
A gas sensor with a gas detecting element featuring a metal oxide layer and electrodes, where the metal oxide layer has a resistance value that changes upon contact with a hydrogen-containing gas, and a local region with a higher degree of oxygen deficiency for enhanced sensitivity and power efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the gas detecting element is heated to 100°C or higher to improve sensitivity for detecting hydrogen, then the sensitivity is improved, but the power consumption increases significantly
Solution Approach 1:
The patent applies local quality by creating a local region with higher oxygen deficiency specifically at the interface between the metal oxide layer and the second electrode. This localized modification enhances the sensitivity of the gas detecting element without requiring overall heating of the entire structure, thereby resolving the contradiction between sensitivity and power consumption.
Solution Approach 2:
The patent changes the chemical parameter of the metal oxide layer by creating a local region with higher oxygen deficiency. This parameter change enables the material to exhibit enhanced gas sensing properties at lower temperatures, allowing the system to achieve high sensitivity without the need for high-temperature heating, thus reducing power consumption.
2Reliability
If the gas detecting element is kept ON during use to ensure continuous detection, then the detection capability is maintained, but the power consumption becomes very large
Solution Approach 1:
By creating a local region with enhanced oxygen deficiency at the electrode interface, the patent enables the gas detecting element to maintain high detection capability at lower operating temperatures. This allows the element to remain ON continuously with significantly reduced power consumption compared to traditional high-temperature operation.
Solution Approach 2:
The modified metal oxide layer with localized oxygen deficiency enables the gas detecting element to perform effective gas detection at lower temperatures, essentially serving itself with reduced energy requirements. The structural modification allows the material to inherently provide better sensing performance without external heating assistance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The gas sensor achieves stable and high-sensitivity detection of hydrogen-containing gases with significantly reduced power consumption, eliminating the need for heating.
Implementation Method 1
the metal oxide layer has a characteristic in which a resistance value of the metal oxide layer changes when the second electrode comes into contact with the gas molecule
Implementation Method 2
a local region is provided in the metal oxide layer and close to the first step, and a degree of oxygen deficiency of the local region is greater than a degree of oxygen deficiency of a region other than the local region in the metal oxide layer
Data Source
AI summary
A gas sensor includes a gas detecting element that includes a first electrode, a metal oxide layer, and a second electrode; and a first insulating film that has an opening allowing the second electrode to be partially exposed therethrough and covers the first electrode, the metal oxide layer, and another part of the second electrode. The metal oxide layer has a characteristic where its resistance value changes as the second electrode makes contact with gas molecules including hydrogen atoms. A first step is provided at a portion lying on an interface between the metal oxide layer and the second electrode and located within the opening as viewed in plan view. A local region is provided in the metal oxide layer and near the first step. A degree of oxygen deficiency of the local region is greater than a degree of oxygen deficiency of other regions in the metal oxide layer.