Self-Aligning IC Dies via Hydrophobic Surface Patterns

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Solution Overview

Problem

Conventional IC die mounting equipment relies on mechanical capabilities, resulting in low throughput and increased manufacturing costs due to slow and inaccurate die placement processes.

Innovation Solution

A method and apparatus that use a hydrophobic material pattern on a substrate or die carrier to align IC dies with exposed areas, applying a water-based solution to form droplets which, through surface tension, align and settle the dies onto predefined areas, and then evaporate to secure them in place.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If mechanical capability is used for die placement, then placement accuracy can be achieved, but throughput is reduced and manufacturing time increases

Engineering Contradiction:
Improvedie placement accuracyVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces the mechanical alignment system with a chemical/wettability-based alignment system. A hydrophobic pattern is deposited on the die carrier surface, creating hydrophilic areas where water-based solution droplets form. IC dies are placed on these droplets, and surface tension causes the dies to self-align with the predefined hydrophilic areas, eliminating the need for complex mechanical alignment mechanisms while maintaining high placement accuracy and enabling concurrent processing of multiple dies

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent implements self-alignment where the IC dies automatically position themselves using surface tension forces from the water-based solution droplets. The hydrophobic pattern pre-defines the alignment areas, and when water droplets are applied, they naturally form on the hydrophilic exposed areas. The dies placed on these droplets self-align without external mechanical intervention, and upon evaporation, they settle precisely on the intended locations

Inventive Principle:
Principle #25Self-service

2Ease of manufacture

If mechanical die mounting equipment is used, then die placement can be performed, but manufacturing costs increase due to prolonged processing time

Engineering Contradiction:
Improvedie mounting capabilityVSAvoidprocessing time
Core Design Contradiction:
Ease of manufactureVSLoss of time

Solution Approach 1:

The patent utilizes the phase transition of water from liquid to vapor through evaporation. Water-based solution droplets are applied to the hydrophilic areas of the die carrier, providing a temporary holding medium for the IC dies during placement and alignment. The droplets are then caused to evaporate, leaving the dies securely positioned on the carrier. This phase transition enables a simple, rapid, and cost-effective die mounting process without complex mechanical pressing or bonding equipment

Inventive Principle:
Principle #36Phase transitions

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly increases the throughput of IC die placement, reducing manufacturing time and costs by enabling high-accuracy self-alignment of multiple dies concurrently, thus lowering the overall cost of chip production.

Implementation Method 1

A water-based solution is applied to the exposed areas such that droplets form on the exposed areas of the substrate surface

Methodology Applied
Scientific EffectSurface tension: Surface Tension

Implementation Method 2

The droplets are then caused to evaporate such that the IC dies settle on the exposed areas of the substrate surface

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentUS10431515B2Methods and apparatus for self-alignment of integrated circuit dies
Publication Date: 2019.10.01 MARVELL ASIA PTE LTD
  • US10431515B2 patent drawing
  • US10431515B2 patent drawing
  • US10431515B2 patent drawing

AI summary

The present disclosure describes apparatuses and techniques for self-aligning integrated circuit (IC) dies. In some aspects, a hydrophobic material is deposited on a surface of a substrate to form a pattern on the surface of the substrate. The pattern may expose areas of the substrate surface for placement of IC dies. A water-based solution is then applied to the exposed areas such that droplets form on the exposed areas of the substrate surface. IC dies are placed on the droplets of the water-based solution, which can cause the IC dies to align with the exposed areas of the substrate surface. The droplets are then caused to evaporate such that the IC dies settle on the exposed areas of the substrate surface.