IGZO Display Panel Gate Structure for Threshold Voltage Stability

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

In display panels, non-bonded oxygens (NBOs) in IGZO thin film transistors affect carrier concentrations, leading to instability in threshold voltage and switching current ratio, which negatively impacts the display effect.

Innovation Solution

A display panel structure is implemented with a first oxygen-absorbing metal layer adjacent to the second semiconductor layer, which absorbs NBOs, thereby reducing their influence on carrier concentrations and improving the stability of thin film transistors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If IGZO is used as semiconductor channel layer material, then high mobility and transparency are achieved, but non-bonded oxygens affect carrier concentrations and reduce device stability

Engineering Contradiction:
Improvecarrier mobilityVSAvoiddevice stability
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

An oxygen-absorbing metal layer is introduced as an intermediary between the IGZO semiconductor layer and the gate electrode. This intermediary layer absorbs non-bonded oxygens (NBOs) that would otherwise affect carrier concentrations in the IGZO layer, thereby stabilizing device performance while preserving high mobility characteristics

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful non-bonded oxygens (NBOs) are extracted or removed from the vicinity of the IGZO semiconductor layer by the oxygen-absorbing metal layer. This extraction process eliminates the source of instability (carrier concentration fluctuations) while maintaining the beneficial electrical properties of IGZO

Inventive Principle:
Principle #2Taking out (Extraction)

2Measurement precision

If IGZO-TFTs are used in display panels, then high precision and low power consumption are achieved, but threshold voltage instability occurs due to non-bonded oxygens

Engineering Contradiction:
Improvedisplay precisionVSAvoidthreshold voltage stability
Core Design Contradiction:
Measurement precisionVSStability of the object's composition

Solution Approach 1:

The oxygen-absorbing metal layer serves as a mediator that stabilizes the chemical environment near the IGZO channel layer, preventing threshold voltage drift caused by non-bonded oxygens while preserving the high precision display characteristics enabled by IGZO-TFTs

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If IGZO is used as semiconductor material, then good uniformity is achieved, but switching current ratio deteriorates due to non-bonded oxygen effects

Engineering Contradiction:
Improvesemiconductor uniformityVSAvoidswitching current ratio
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

Non-bonded oxygens that degrade switching current ratio are extracted from the IGZO semiconductor structure by the oxygen-absorbing metal layer, thereby recovering the switching performance while maintaining the inherent uniformity of IGZO films

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The introduction of the oxygen-absorbing metal layer enhances the stability of carrier concentrations, improving the threshold voltage and switching current ratio, resulting in improved device stability and display performance.

Implementation Method 1

one side of the third gate electrode adjacent to the second semiconductor layer is provided with a first oxygen-absorbing metal layer, and the first oxygen-absorbing metal layer overlaps the second semiconductor layer

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Data Source

PatentUS20240194687A1Display panel, display device, and manufacturing method thereof
Publication Date: 2024.06.13 WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO LTD
  • US20240194687A1 patent drawing
  • US20240194687A1 patent drawing
  • US20240194687A1 patent drawing

AI summary

A display panel includes a substrate, a first semiconductor layer, a first metal layer, a second metal layer, a second semiconductor layer, and a third metal layer. The third metal layer includes a third gate electrode, and the third gate electrode overlaps the second semiconductor layer. One side of the third gate electrode adjacent to the second semiconductor layer is provided with a first oxygen-absorbing metal layer, and the first oxygen-absorbing metal layer overlaps the second semiconductor layer. The present disclosure can improve a display effect of the display panel.