Image-Guided Sample Transfer for Automated FIB Preparation
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Solution Overview
Problem
Existing sample preparation apparatuses lack the capability to accurately automate the extraction and transfer of sample pieces processed with ion beams to sample holders, particularly in miniaturized formats, leading to positional accuracy issues and inefficient sampling operations.
Innovation Solution
An automatic sample preparation apparatus is developed, utilizing a charged particle beam device with a focused ion beam and electron beam irradiation system, a needle drive mechanism, and image-based control to accurately position and transfer sample pieces to a sample holder, leveraging image data and templates for precise automation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If manual sampling operation is used, then operational flexibility is maintained, but automation capability and efficiency are insufficient
Solution Approach 1:
The system performs automatic sampling operations without manual intervention. The automated sampling head moves independently to extract sample pieces, transfer them to the sample holder, and return to the starting position, enabling the system to serve itself in the sampling process.
Solution Approach 2:
The patent replaces manual mechanical sampling operations with an automated mechanical system. The automated sampling head, controlled by a computer, substitutes human operators to perform extraction, transfer, and positioning operations, achieving full automation while maintaining operational precision.
2Measurement precision
If sample pieces are miniaturized, then analysis precision is improved, but positional accuracy during transfer deteriorates
Solution Approach 1:
The system creates a digital model (copy) of the sample holder's pixel structure. By mapping the physical pixel positions to a digital representation, the system can accurately calculate and control the transfer positions of miniaturized sample pieces, maintaining high positional accuracy despite their small size.
Solution Approach 2:
The patent introduces a digital dimension to the physical sampling process. By using computer-controlled movements and digital image processing, the system adds a layer of precision control that enables accurate handling of miniaturized samples, resolving the contradiction between sample size reduction and transfer accuracy.
3Productivity
If automated sampling is implemented, then productivity is improved, but device complexity increases
Solution Approach 1:
The automated sampling head is designed as a multi-functional device that can perform extraction, transfer, positioning, and return operations. This universal design consolidates multiple functions into a single mechanism, improving productivity while controlling overall system complexity.
Solution Approach 2:
The system uses image processing to detect the positions of sample pieces and the sampling head. This feedback mechanism enables real-time position monitoring and correction, allowing the automated system to maintain high productivity through precise control without requiring overly complex mechanical structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables accurate and automated transfer of sample pieces, improving positional accuracy and efficiency by using image data and templates to guide the needle and stage movements, ensuring precise placement on the sample holder.
Implementation Method 1
a technology for appropriately automating a sampling operation of the sample pieces cannot be realized. In addition, the term 'sampling' used in the present specification indicates processing which extracts a sample piece prepared by irradiating the sample with a charged particle beam including electrons or ions
Implementation Method 2
observation, analysis, and measurement using an electron beam of a scanning electron microscope, a transmission electron microscope, or the like
Data Source
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Figure 5
AI summary
A charged particle beam device (10a) includes a computer (21) which controls multiple charged particle beam irradiation optical systems, the needle (18), and a gas supply portion (17) to transfer a sample piece Q to a predetermined position of the sample piece holder P, based on at least images of a sample piece holder (P), a needle (18), and the sample piece (Q) previously acquired by multiple charged particle beams.