Image Sensor Air Grid Structural Stability

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Solution Overview

Problem

Image sensors face challenges in maintaining stability under increased air pressure, particularly due to the concentration of internal pressure on weak points in air grid structures, which can lead to damage and optical crosstalk between adjacent pixels.

Innovation Solution

The implementation of a grid structure in image sensors that includes air layers with a metal layer and capping films, where second grid structures are strategically placed at intersections to physically isolate air layers and distribute pressure, preventing collapse and minimizing optical crosstalk through refractive index differences and light absorption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If air layers are used in grid structures to provide optical isolation between pixels, then optical crosstalk is reduced, but structural stability under increased pressure deteriorates due to pressure concentration on weak points

Engineering Contradiction:
Improveoptical crosstalkVSAvoidstructural stability under pressure
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent divides the continuous air layer into segmented regions by introducing second grid structures at intersections. These second grid structures partition the air layer into multiple isolated segments, preventing pressure concentration across the entire air layer while maintaining optical isolation functionality between adjacent pixels.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces second grid structures as intermediary elements at the intersections of first grid structures. These intermediary structures act as support points that mediate between the air layers and external pressure, distributing the mechanical load and preventing direct pressure concentration on the air layer boundaries.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If grid structures are added to separate pixels, then optical isolation is improved, but device complexity increases due to additional structures at intersections

Engineering Contradiction:
Improveoptical crosstalkVSAvoidgrid structure complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The patent merges the functions of optical isolation and structural support into a unified grid structure system. The first and second grid structures work together as an integrated network, where the second grid structures at intersections serve dual purposes of both supporting the air layers and maintaining the optical isolation boundaries.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The second grid structures introduced at intersections serve multiple functions simultaneously: they provide mechanical support to prevent air layer collapse under pressure, maintain the geometric integrity of the pixel boundaries, and contribute to the overall optical isolation by reinforcing the grid network that separates adjacent pixels.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution maintains the stability of the air grid structure under increased pressure and reduces optical crosstalk between pixels, enhancing the reliability and performance of image sensors.

Implementation Method 1

each of the first grid structures including an air to provide optical isolation between two adjacent imaging pixels

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

each of the first grid structures including a low-index material to provide optical isolation between two adjacent imaging pixels

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

The second grid may include a metal layer made of a metal and a first capping film disposed on the metal layer

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS11515343B2Image sensor
Publication Date: 2022.11.29 SK HYNIX INC
  • US11515343B2 patent drawing
  • US11515343B2 patent drawing
  • US11515343B2 patent drawing

AI summary

Designs of image sensors including a plurality of first gild structures arranged in row and column directions of a pixel array of imaging pixels and structured to separate the imaging pixels from one another, each of the first grid structures including an air to provide optical isolation between two adjacent imaging pixels and a plurality of second grid structures respectively disposed at each intersection between the row direction and the column direction in which the first grid structures are arranged.