Solid-State Image Sensor Color Filter Planarization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing method of manufacturing solid-state image sensors requires an additional step of planarizing concave portions before forming a color filter, leading to decreased productivity and increased production costs due to striation issues.
Innovation Solution
A method involving the deposition of multiple layers of color filter materials with different types, where a first material film is patterned to form a color filter in the light-receiving region and an embedded member in the concave portions of the peripheral region, and a second material film is used to cover the embedded member, reducing striations and eliminating the need for a resin layer planarization step.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a resin film is deposited to embed concave portions before forming color filters, then striation is reduced, but productivity decreases and production cost increases due to additional planarization steps
Solution Approach 1:
The patent applies preliminary action by forming a first color filter layer that intentionally fills and planarizes concave portions on the substrate surface before forming subsequent color filter layers. This preliminary planarization is integrated into the color filter formation process itself, eliminating the need for separate resin deposition and planarization steps, thus maintaining thickness uniformity while improving productivity
Solution Approach 2:
The patent merges the planarization function with the color filter formation process. The first color filter layer serves dual purposes: it forms the color filter structure and simultaneously planarizes the substrate surface by filling concave portions. This combines two previously separate processes (planarization and color filter formation) into one integrated step, reducing total process steps and improving productivity
2Manufacturing precision
If a resin film is deposited to embed concave portions before forming color filters, then striation is reduced, but production cost increases
Solution Approach 1:
The patent merges the planarization function with the color filter formation process. The first color filter layer serves dual purposes: it forms the color filter structure and simultaneously planarizes the substrate surface by filling concave portions. This combines two previously separate processes (planarization and color filter formation) into one integrated step, reducing total process steps and improving productivity
Solution Approach 2:
The first color filter layer material is used for multiple functions: it provides the color filter optical function and simultaneously serves as a planarization layer to fill concave portions. This multi-functionality eliminates the need for separate resin materials and planarization steps, reducing material costs and process complexity
3Productivity
If multiple color filter layers are formed without embedding concave portions, then productivity is maintained, but striation and thickness unevenness occur
Solution Approach 1:
The patent applies preliminary action by forming a first color filter layer that intentionally fills and planarizes concave portions on the substrate surface before forming subsequent color filter layers. This preliminary planarization is integrated into the color filter formation process itself, eliminating the need for separate resin deposition and planarization steps, thus maintaining thickness uniformity while improving productivity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces striations and thickness unevenness, increases productivity, and decreases production costs by eliminating the need for an additional planarization step, while improving light collection efficiency and adhesion of the color filter.
Implementation Method 1
depositing, over the structure, a first material film by using a color filter material of a first type
Implementation Method 2
depositing, over the structure, a second material film by using a color filter material of a second type different from the color filter material of the first type
Data Source
AI summary
A method of manufacturing a solid-state image sensor is provided. The method comprises preparing a structure which is covered by a protective film, depositing a first material by using a first color filter material on the protective film, forming a first color filter from the first material, depositing a second material by using a second color filter material after the forming the first color filter and forming a second color filter from the second material. An upper surface of the protective film has a concave portion. A part of the first material enters the concave portion in the depositing the first material, the first material is patterned so as to form a member in the concave portion from the first material in the forming the first color filter and the second material covers the member in the depositing the second material.