Image Sensor Fence Structure with Metal Barrier Layer

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Solution Overview

Problem

Current image sensors face challenges in preventing materials from the mask layer from penetrating through the low refractive index layer, which can affect the structural integrity and performance of the fence structure in image sensors.

Innovation Solution

Incorporating a penetration prevention layer between the low refractive index layer and the mask layer, along with a barrier layer that includes metals, to form a fence structure with specific lateral protrusions and recesses, thereby preventing material penetration and enhancing the structural integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If a low refractive index layer is used in the fence structure, then optical performance is improved, but materials from the mask layer can penetrate through it

Engineering Contradiction:

Improveoptical performanceVSAvoidstructural integrity

Core Design Contradiction:

Illumination intensityVSReliability

Solution Approach 1:

The patent implements a multi-layer nested structure where the low refractive index layer is positioned inside the fence structure, and penetration prevention layers are nested within the barrier layer. This nested arrangement allows the low refractive index layer to maintain optical performance while being protected by inner penetration prevention layers that stop mask material from reaching it.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent introduces penetration prevention layers as intermediary components between the mask layer and the low refractive index layer. These intermediary layers act as barriers that prevent direct contact and material penetration between the mask layer and the optically sensitive low refractive index layer, thereby protecting structural integrity while preserving optical function.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If a penetration prevention layer is added between the low refractive index layer and mask layer, then material penetration is prevented, but device complexity increases

Engineering Contradiction:

Improvematerial penetration preventionVSAvoidlayer structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines multiple functions into the barrier layer structure. The barrier layer simultaneously serves as a structural component of the fence and incorporates penetration prevention layers within it. This merging approach integrates the penetration prevention function into the existing fence structure rather than adding completely separate components, thereby reducing overall device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The barrier layer is designed with multi-functionality, serving both as a structural element of the fence and as a container for penetration prevention layers. This universal design allows a single structural component to fulfill multiple roles: maintaining fence integrity, preventing material penetration, and protecting the low refractive index layer, thereby minimizing the need for additional separate components.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Data Source

PatentUS11670657B2Image sensor including fence structure disposed laterally of color filters

Publication Date: 2023.06.06 SAMSUNG ELECTRONICS CO LTD

AI summary

An image sensor includes; a photoelectric conversion element disposed on a substrate, a fence structure disposed on the substrate and including a low refractive index layer stacked on a barrier layer, wherein the barrier layer includes at least one metal, and a color filter disposed inwardly lateral with respect to a sidewall of the fence structure, wherein the barrier layer includes an inward lateral protrusion.