Image Sensor Partition Layer Geometry for Shading and Color Mixing
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Solution Overview
Problem
Existing solid-state imaging devices, such as CMOS and CCD, face limitations in further improving image quality, particularly in reducing shading, sensitivity decrease, and color mixture, especially in peripheral portions of the imaging region.
Innovation Solution
A solid-state imaging device with a pixel array unit featuring a partition layer between color filters, where the partition layer has distinct widths on the light incident side and the semiconductor substrate side, and is configured with a metal layer covered by an oxide film, allowing for asymmetrical or symmetrical shapes to optimize light reflection and pupil correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a conventional partition layer with uniform width is used between color filters, then the structure is simple and easy to manufacture, but shading and color mixture cannot be effectively suppressed in peripheral portions of the imaging region
Solution Approach 1:
The partition layer is designed with an asymmetric width configuration where the first width (first region) differs from the second width (second region). This asymmetric structure enables effective suppression of shading and color mixture in peripheral portions of the imaging region while maintaining manufacturing feasibility through standardized fabrication processes.
Solution Approach 2:
The partition layer implements different widths in different regions: a first width in the first region and a second width in the second region. This local variation in geometric properties allows optimized light management for different functional areas, suppressing harmful optical effects where they occur most severely.
2Object-affected harmful factors
If the partition layer width is increased to suppress color mixture, then color separation improves, but sensitivity decreases due to reduced light transmission area
Solution Approach 1:
The partition layer uses different widths in different regions to balance color separation and light transmission. By positioning wider sections where color mixture is most problematic and narrower sections where light transmission is critical, the design achieves effective color filtering without excessive sensitivity loss.
Solution Approach 2:
The partition layer applies width variation only in specific regions rather than uniformly across the entire structure. This partial application of the width-differentiation principle targets the most problematic areas for color mixture suppression while preserving light transmission in regions where sensitivity is paramount.
3Manufacturing precision
If a multi-layer partition structure with different widths is implemented, then image quality improves through better light management, but manufacturing precision requirements increase
Solution Approach 1:
The partition layer employs an asymmetric two-width design that achieves superior light management precision through controlled geometric asymmetry. This asymmetric structure provides the necessary precision for suppressing shading and color mixture while remaining compatible with standard semiconductor fabrication capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses shading, reduces sensitivity loss, and minimizes color mixture, enhancing image quality by appropriate pupil correction and light management within the imaging device.
Implementation Method 1
the partition layer has a first width and a second width in order from a light incident side... effectively suppresses shading, reduces sensitivity loss, and minimizes color mixture
Data Source
AI summary
To provide a solid-state imaging device capable of improving image quality and an electronic apparatus equipped with the solid-state imaging device. There is provided a solid-state imaging device including a pixel array unit in which a plurality of pixels is one-dimensionally or two-dimensionally arrayed, the pixel array unit including a color filter and a semiconductor substrate for each pixel, a partition layer being formed between the color filters, the partition layer having a first width and a second width in order from a light incident side, the first width and the second width being different, and the second width being larger than the first width, and there is further provided an electronic apparatus equipped with the solid-state imaging device.