Image Sensor Resonance Layer Layout for Pixel-Peripheral Height Differences
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current image sensors face challenges in effectively managing the height difference between active pixel regions and peripheral regions, which can affect light reflection and signal processing efficiency.
Innovation Solution
The image sensor design incorporates a resonance layer with varying thicknesses in the active and peripheral regions, along with a metal layer and reflective layers, to address the height difference and enhance light resonance and signal processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a uniform resonance layer thickness is used across the substrate, then the manufacturing process is simple, but light resonance performance deteriorates due to height difference between active pixel region and peripheral region
Solution Approach 1:
The resonance layer is designed with different thicknesses in different regions: a first thickness in the active pixel region and a second thickness in the peripheral region. This local differentiation allows the resonance layer to adapt to the height difference between regions, improving light resonance performance in the active pixel region while maintaining manufacturing feasibility through a systematic thickness variation approach.
2Reliability
If the resonance layer thickness is increased in the active pixel region, then light resonance performance is improved, but the height difference between active pixel region and peripheral region increases
Solution Approach 1:
The thickness parameter of the resonance layer is optimized to different values in different regions. By setting the first thickness in the active pixel region and the second thickness in the peripheral region, the patent achieves improved light resonance performance while controlling the overall height difference through carefully selected thickness values.
3Reliability
If multiple resonance layers with different thicknesses are used, then light resonance and signal processing efficiency are improved, but device complexity increases
Solution Approach 1:
The resonance layer is segmented into different thickness regions (first thickness in active pixel region, second thickness in peripheral region) to achieve improved light resonance and signal processing efficiency. This segmentation allows each region to be optimized for its specific function while maintaining a relatively simple overall structure compared to using multiple completely separate layers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves light resonance and signal processing efficiency by optimizing the thickness of the resonance layer and reflective layers, effectively managing the height difference between active and peripheral regions, thereby enhancing the overall performance of the image sensor.
Implementation Method 1
a resonance layer on the lower reflective layer... improves light resonance and signal processing efficiency by optimizing the thickness of the resonance layer
Implementation Method 2
a lower reflective layer on the substrate and the metal layer... an upper reflective layer on the resonance layer
Implementation Method 3
each of the pixels may be configured to output an image signal from light energy. Each of the pixels may be configured to accumulate a photocharge corresponding to the amount of light incident through a photoelectric conversion element
Data Source
AI summary
An image sensor including a substrate including an active pixel region and a peripheral region surrounding the active pixel region; a metal layer on a peripheral region of the substrate; a lower reflective layer on the substrate and the metal layer; a resonance layer on the lower reflective layer; and an upper reflective layer on the resonance layer, wherein the resonance layer has a first thickness on the active pixel region in a vertical direction perpendicular to an upper surface of the substrate and a second thickness in the vertical direction on the peripheral region, and the first thickness is greater than the second thickness.