X-ray Imaging Panel Drain Electrode Positioning for Defect Reduction
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Solution Overview
Problem
The challenge is to reduce patterning defects in the data line and drain electrode of X-ray imaging panels without lowering the aperture ratio, as larger photodiode areas improve image resolution but narrow gaps between elements increase susceptibility to manufacturing defects.
Innovation Solution
The design includes a substrate with gate and data lines, conversion elements, and thin film transistors with a drain electrode positioned more internally than the conversion element near the data line, maintaining the aperture ratio while enlarging the gap between the data line and drain electrode to reduce pattern defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the area of the photodiode is increased to improve image resolution, then the definition and resolution of the image are improved, but the gaps between elements in the same layer become narrower, increasing susceptibility to pattern defects
Solution Approach 1:
The invention repositions the drain electrode in the same layer as the data line but places it more inside the pixel region, effectively utilizing the vertical dimension (depth into the pixel) to create separation. This dimensional rearrangement allows the photodiode to extend closer to the data line while the drain electrode is positioned inward, maintaining both large photodiode area and sufficient gap without compromising manufacturing precision
Solution Approach 2:
The drain electrode is positioned asymmetrically within the pixel region, specifically more inside than the conversion element near the data line. This asymmetric placement optimizes the spatial relationship between the drain electrode and data line, creating adequate gap distance while preserving photodiode area for high-resolution imaging
2Area of stationary object
If the drain electrode is positioned closer to the data line to maximize photodiode area, then the aperture ratio is improved, but the gap between elements is reduced, increasing pattern defect risk
Solution Approach 1:
The invention applies different spatial requirements to different elements: the photodiode is allowed to extend close to the data line to maximize aperture ratio, while the drain electrode is specifically positioned more inside the pixel region to ensure adequate gap and manufacturing reliability. This localized quality differentiation resolves the contradiction between aperture ratio and manufacturing reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces patterning defects in the data line and drain electrode of the imaging panel without compromising the aperture ratio, enhancing the manufacturing process and image quality.
Implementation Method 1
an imaging panel for capturing scintillation light that has been converted by a scintillator from X-rays
Implementation Method 2
the plurality of conversion elements receiving the scintillation light and converting the scintillation light to electric charge
Data Source
AI summary
Provided is a technique that reduces patterning defects of data lines in an imaging panel and drain electrodes in thin film transistors without lowering the aperture ratio of the imaging panel. The imaging panel captures scintillation light, which are X-rays that have passed through a specimen and been converted by a scintillator. The imaging panel includes a plurality of gate lines and a plurality of data lines. The imaging panel includes, in each of the pixels, a conversion element that converts scintillation light to electric charge, and a thin film transistor connected to the gate line, data line, and conversion element. A drain electrode of the thin film transistor is formed such that edges of the drain electrode near the data line are more inside the pixel than edges of the conversion element near the data line.