Imprint Adhesion Layer Using Single Hydrolyzable Silane
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Solution Overview
Problem
Conventional silane coupling agents used for preventing resin layer adherence to molds in imprint processes often result in transfer defects, degradation due to hydrolysis, and inaccurate pattern formation due to thick adhesion layers at substrate ends and stepped sites.
Innovation Solution
An imprint process utilizing an adhesion layer formed with a compound containing a tetravalent atom bonded to a substrate via an oxygen atom and having two inert groups, along with a reactive functional group, which prevents unnecessary bonding and ensures uniform thickness, thereby preventing transfer defects and improving storage stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a silane coupling agent with three functional groups is used to improve adhesion between the transfer substrate and cured resin layer, then adhesion is improved, but transfer defects occur and storage stability deteriorates due to hydrolysis
Solution Approach 1:
The patent changes the chemical structure parameter of the coupling agent by using a silane compound with exactly one hydrolyzable group instead of the conventional three functional groups. This parameter change reduces hydrolysis reactions, improving storage stability while maintaining adhesion through the single reactive group that forms strong bonds with both substrate and resin.
Solution Approach 2:
The patent extracts the problematic hydrolyzable groups from the silane coupling agent structure, retaining only one essential hydrolyzable group while removing the others. This extraction eliminates excessive hydrolysis reactions that cause degradation and storage issues, while preserving the necessary adhesion function.
2Strength
If a silane coupling agent is coated on the transfer substrate by spin coating to form an adhesion layer, then adhesion is improved, but the adhesion layer becomes thick at the ends or stepped sites, resulting in inability to implement pattern formation with high accuracy
Solution Approach 1:
The patent changes the chemical reactivity parameter of the coupling agent by using a compound with one hydrolyzable group that reacts more selectively and uniformly with the substrate surface. This parameter change prevents excessive adhesion layer formation at ends and stepped sites, enabling high-precision pattern formation while maintaining adhesion.
Solution Approach 2:
The patent applies local quality control by using a silane coupling agent with controlled reactivity that forms adhesion layers of uniform thickness across different substrate regions. The single hydrolyzable group ensures consistent local bonding without the excessive thickness problems associated with conventional multi-functional coupling agents at ends and stepped sites.
3Strength
If conventional silane coupling agents are used to prevent resin layer adherence to molds, then adhesion is improved, but transfer defects occur during mold release
Solution Approach 1:
The patent changes the chemical structure parameter of the coupling agent to have one hydrolyzable group instead of three, which modifies the bonding characteristics. This parameter change allows the adhesion layer to form strong bonds with both substrate and resin while preventing excessive adhesion to the mold during release, thereby eliminating transfer defects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures reliable contact between the work-material and transfer substrate, preventing transfer defects and enabling high-precision pattern formation while enhancing storage stability and reducing production costs.
Implementation Method 1
an adhesive comprising a compound including in one molecule a tetravalent atom having one hydrolysable group and two inert groups, and a reactive functional group bonded to said atom is brought into contact with said substrate blank
Implementation Method 2
a tetravalent atom having one hydrolysable group and two inert groups
Data Source
AI summary
The imprint process of the invention includes at least an adhesion layer-formation step, a filling step, a curing step, and a releasing step. In the adhesion layer-formation step, an adhesive including a compound including in one molecule a tetravalent atom having one hydrolysable group and two inert group, and a reactive functional group bonded to the atom is brought into contact with a substrate blank that is then scrubbed thereby forming an adhesion layer on the substrate blank to prepare a transfer substrate. In the filling step, a mold is located in proximity to the transfer substrate with a work-material interleaved between the mold and the adhesion layer to fill the work-material up in a transfer shape area of the mold; in the curing step, the work-material is cured; and in the releasing step, the mold is released off from the work-material.