Imprint Apparatus Edge Shot Resin Protrusion Control
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Solution Overview
Problem
In the imprint technique, resin protrusion occurs in edge shot regions due to capillary action or spreading, leading to defects and inefficiencies in pattern formation on substrates with edge regions.
Innovation Solution
An imprint apparatus and method that control light irradiation to prevent resin protrusion by initiating irradiation in the near-edge region before resin spreads from the pattern forming region to the near-edge region, ensuring proper curing and pattern transfer in edge shot regions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If imprinting is performed in edge shot regions, then the number of chips manufactured from one substrate is increased, but resin protrusion occurs due to capillary action or spreading
Solution Approach 1:
The patent applies preliminary action by irradiating the near-edge region with light before the mold pattern surface contacts the resin. This pre-curing creates a barrier that prevents resin from protruding into the near-edge region during subsequent imprinting, while still allowing the pattern forming region to be properly filled and cured
2Manufacturing precision
If resin is allowed to spread freely during imprinting, then complete pattern transfer is achieved, but resin flows out of the substrate in edge shot regions
Solution Approach 1:
The patent applies local quality by differentiating the treatment of two distinct regions: the pattern forming region allows free resin spreading for complete pattern transfer, while the near-edge region receives preliminary irradiation to create a cured barrier that locally prevents resin overflow
3Manufacturing precision
If the mold pattern surface is brought into contact with resin in edge shot regions, then pattern transfer is enabled, but resin is drawn into recesses by capillary action
Solution Approach 1:
The patent applies preliminary anti-action by pre-irradiating the near-edge region to cure the resin before the mold contacts it. This creates a hardened barrier that counteracts the capillary forces that would otherwise draw resin into recesses and prevent it from flowing out of the substrate
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively suppresses resin protrusion from the substrate, preventing defects and enhancing the accuracy and efficiency of pattern formation in edge shot regions during the imprinting process.
Implementation Method 1
a photo-curing resin is coated on a substrate, a pattern surface of a mold is brought into contact with the resin, and the resin is cured with light
Implementation Method 2
the resin may be drawn by suction into the recesses of the pattern due to a capillary action, and flow out of the substrate along these recesses
Data Source
AI summary
An imprint apparatus performs includes an irradiation unit which irradiates a resin on a substrate with light, and a control unit which controls the irradiation unit. The imprinting is performed in an edge shot region, including an edge of the substrate, of a plurality of shot regions on the substrate. The edge shot region includes a pattern forming region where a pattern is to be formed, and a near-edge region closer to a side of the edge than the pattern forming region, and the control unit controls the irradiation unit to irradiate the resin which spreads from a position on the pattern forming region to a position on the near-edge region as the pattern surface comes into contact with the resin in the pattern forming region.