Imprint Lithography Ink Composition for Pattern Transfer

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Solution Overview

Problem

Current photolithographic methods face challenges in forming fine patterns smaller than 70 nm due to light interference, requiring expensive equipment and lengthy processing times, while imprint lithographic and roll-printing techniques suffer from ink composition issues like contamination and reduced accuracy due to high flowability and evaporation rates.

Innovation Solution

An ink composition comprising 5-45 parts by weight of polymer resin, 5-45 parts by weight of a tackifier, and 50-90 parts by weight of an organic solvent, designed for imprint lithography and roll-printing, which maintains tackiness and deformability, reducing contamination and improving pattern transfer efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If an ink composition with high flowability and evaporation rate is used in imprint lithography and roll-printing, then the pattern transfer process is simplified and productivity is improved, but the ink composition soaks into the blanket causing contamination and reducing the number of times of use

Engineering Contradiction:

Improvepattern transfer efficiencyVSAvoidink composition contamination

Core Design Contradiction:

ProductivityVSLoss of substance

Solution Approach 1:

The patent modifies the chemical composition parameters of the ink by incorporating specific polymers (acrylic, styrene-butadiene, or silicone-based), tackifiers (rosin, coumarone-indene, or petro resin), and organic solvents (alcohols, ethers, esters, or ketones) in controlled ratios to achieve optimal viscosity and transfer characteristics that prevent blanket soaking while maintaining high pattern transfer efficiency

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite ink composition by combining multiple components (polymer resin, tackifier, and organic solvent) with specific weight ratios (polymer resin: 5-45 parts, tackifier: 5-45 parts, organic solvent: 50-90 parts) to achieve a material with balanced flowability, evaporation rate, and transfer properties that prevent contamination

Inventive Principle:

Principle #40Composite materials

2Reliability

If cleaning operation is carried out by physical contact to remove impurities on the ink composition, then the blanket is cleaned, but the surface is easily damaged by friction

Engineering Contradiction:

Improveblanket cleanlinessVSAvoidblanket surface integrity

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The patent replaces mechanical cleaning methods with chemical cleaning approaches using the specially formulated ink composition components that can be removed through solvent action rather than friction, thereby maintaining blanket surface integrity while achieving thorough cleaning

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Productivity

If an imprint or roll-printing process is carried out in a state that the ink composition of the blanket is not removed, then continuous production is maintained, but a fine pattern of the ink composition is wrongly formed on the substrate or excessive quality defects occur

Engineering Contradiction:

Improvecontinuous production capabilityVSAvoidpattern formation accuracy

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent enables continuous production by formulating an ink composition with controlled evaporation rate and transfer characteristics that allows for efficient pattern transfer without excessive soaking, maintaining productivity while preventing quality defects through optimized material properties rather than interrupting the production process

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The patent adjusts the physical and chemical parameters of the ink composition (viscosity, evaporation rate, transfer efficiency) through specific component selection and ratio control to achieve a balance that prevents wrong pattern formation and quality defects while maintaining continuous production capability

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The ink composition enhances pattern transfer rate and accuracy, reduces processing time, and increases the yield and efficiency of the pattern formation process by minimizing contamination and surface damage, allowing for continuous and precise fine pattern transfer.

Implementation Method 1

an ink composition comprising: 5 to 45 parts by weight of polymer resin; 5 to 45 parts by weight of a tackifier; and 50 to 90 parts by weight of an organic solvent

Methodology Applied

Scientific EffectDissolution: Solvation

Implementation Method 2

a method of forming a pattern using the same, the method comprising: bringing the ink composition into contact with a blanket having a pattern formed thereon, to transfer the pattern on the substrate

Methodology Applied

Scientific EffectAdhesion: Adhesive

Data Source

PatentUS8492459B2Ink composition and method of forming a pattern using the same

Publication Date: 2013.07.23 LG DISPLAY CO LTD

AI summary

There are provided an ink composition for imprint lithography and roll-printing, which is applied to the formation of a pattern using imprint lithography and roll-printing to play the role of a pattern support, can increase the accuracy of pattern formation by minimizing the occurrence of a swelling phenomenon caused by the ink composition, and can improve yield and the efficiency of the process by increasing the transfer rate of a pattern, and a method of forming a pattern of a display or semiconductor by using the same.