Imprint Mold Peeling via Center of Gravity Force Application
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Solution Overview
Problem
Existing imprint methods face challenges in peeling a mold off a resin layer with minimal peeling force to avoid resin deposition on the mold and prevent mold breakdown, especially as the contact area increases, leading to inadequate solutions for reduced peeling force and pattern integrity.
Innovation Solution
The method involves recognizing the region of contact, determining the center of gravity, and applying peeling force at a specific point relative to the center of gravity to minimize the peeling force required, using a combination of region-of-contact recognition, center-of-gravity calculation, and strategic peeling force application to avoid resin deposition and mold damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the contact area between mold and resin layer is increased to boost productivity, then productivity is improved, but the peeling force required increases dramatically causing resin deposition on mold and mold breakdown
Solution Approach 1:
The invention applies a releasing layer with specific fluorine component composition (CF2, CF3, C2F6 groups) to the concavo-convex surface of the mold, creating localized low-surface energy regions that reduce adhesion between the resin layer and mold surface. This local modification of surface properties enables effective peeling even with large contact areas, resolving the contradiction between productivity and peeling force requirements.
Solution Approach 2:
The invention changes the chemical composition parameters of the releasing layer by incorporating specific fluorine-containing groups (CF2, CF3, C2F6) in controlled ratios. By adjusting the density and distribution of these low-surface energy groups on the mold surface, the adhesion characteristics are modified to reduce peeling force requirements while maintaining large contact areas for high productivity.
2Force
If a releasing layer containing fluorine component is applied to reduce peeling force, then peeling force is reduced, but the method is only effective when contact area is limited and becomes inadequate for large contact areas
Solution Approach 1:
The invention optimizes the fluorine component parameters by controlling the density, distribution, and chemical structure (CF2, CF3, C2F6 groups) of the releasing layer. This parameter optimization enables the releasing layer to maintain effectiveness across a wide range of contact areas, from small to large, thereby improving adaptability while keeping peeling force low.
Solution Approach 2:
The releasing layer is constructed as a composite structure combining fluorine-containing compounds with specific molecular groups (CF2, CF3, C2F6) on the mold surface. This composite material approach creates a versatile releasing layer that maintains low adhesion properties regardless of contact area size, enabling the method to adapt to different productivity requirements.
3Ease of operation
If strong peeling force is applied to peel off the mold, then peeling is achieved, but resin deposition on mold and mold breakdown occur
Solution Approach 1:
The releasing layer with fluorine components creates localized low-adhesion zones on the mold surface, particularly in the concavo-convex regions where resin contact occurs. This local quality modification allows the mold to be peeled off with minimal force, preventing both resin deposition on the mold and mechanical damage to the mold structure.
Solution Approach 2:
The fluorine-containing releasing layer acts as an intermediary substance between the resin layer and the mold surface. This intermediary layer reduces the adhesion strength, allowing the mold to be easily peeled off without direct resin-mold bonding, thereby preventing resin deposition and mold breakdown while maintaining operational ease.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for peeling with significantly reduced peeling force, minimizing resin deposition on the mold and preventing mold breakdown, while maintaining pattern integrity by concentrating force efficiently on the outer periphery of the contact region.
Implementation Method 1
a risk of inconvenient deposition of the resin that is the material to be transferred onto the mold, and a risk of mold breakdowns has correlations with the peeling force necessary for peeling
Implementation Method 2
the force necessary for peeling grows much stronger, so the simple provision of the releasing layer would be far away from the solution of a problem with peeling
Data Source
AI summary
An imprint method includes, in the peeling step of peeling a mold off the material layer to be transferred, a region-of-contact recognition operation of recognizing and determining a region of contact of the mold with the material layer to be transferred, a center-of-gravity locating operation of determining a center of gravity of a morphology of the thus recognized region of contact on the basis of that morphology, and a peeling operation of determining a point of force for applying peeling force to the mold or the imprinting substrate in relation to the center of gravity determined by the center-of-gravity locating operation, thereby acting the peeling force on the point of force.