Imprint Mold Inspection via Light Scattering
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Solution Overview
Problem
Existing imprint apparatuses face challenges in accurately determining mold abnormalities, leading to unnecessary mold removal and inspection due to false positives from foreign matters or substrate defects, which affects production yield.
Innovation Solution
An imprint apparatus equipped with a measuring device that projects light onto the mold, measures scattered light, and uses a controller to compare measurement signals with reference signals to identify discrepancies, providing an index for mold inspection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If film characteristics measurement is used to detect mold abnormalities, then mold inspection capability is improved, but false positive detection increases due to foreign matters on substrate or defects in film
Solution Approach 1:
The detection system is segmented into two independent parts: substrate/film inspection and mold inspection. The mold inspection uses direct light scattering measurement from the mold surface, separating it from the film characteristics measurement that may be affected by substrate foreign matters or film defects. This segmentation allows independent verification of mold status without false positives from other sources.
Solution Approach 2:
Light scattering measurement serves as an intermediary method to indirectly assess mold condition without contacting the mold or requiring mold removal. The light scattering properties of the mold surface provide information about mold abnormalities (such as adhered cured resin) without being influenced by substrate or film conditions.
2Productivity
If mold inspection is performed frequently to ensure quality, then production yield is improved, but production time is increased due to unnecessary mold removal and inspection
Solution Approach 1:
The mold inspection is performed preliminarily and continuously during the imprint process using light scattering measurement, rather than waiting for film inspection results that may indicate false positives. This preliminary detection prevents unnecessary mold removal and reinspection, saving time while maintaining quality assurance.
Solution Approach 2:
The mold performs self-inspection through light scattering measurement during normal operation, eliminating the need for separate inspection steps and mold removal. The mold's own optical properties are utilized to detect its own abnormalities, enabling continuous monitoring without production interruption.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables accurate and efficient mold inspection, reducing unnecessary mold removal and improving production yield by distinguishing actual mold abnormalities from false positives.
Implementation Method 1
a measuring device configured to project a light onto the mold, to receive a light scattered by the mold, and to measure the scattered light
Data Source
AI summary
The imprint apparatus of the present invention molds an uncured resin on a substrate using a mold to form a resin pattern on the substrate. The apparatus includes a measuring device configured to project a light onto the mold, to receive a light scattered by the mold, and to measure the scattered light; and a controller. The controller is configured to store a reference signal, to cause the measuring device to measure the mold to obtain a measurement signal, and to obtain an index indicating a discrepancy between the measurement signal and the reference signal.